JPS5444679B2 - - Google Patents

Info

Publication number
JPS5444679B2
JPS5444679B2 JP3492972A JP3492972A JPS5444679B2 JP S5444679 B2 JPS5444679 B2 JP S5444679B2 JP 3492972 A JP3492972 A JP 3492972A JP 3492972 A JP3492972 A JP 3492972A JP S5444679 B2 JPS5444679 B2 JP S5444679B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3492972A
Other languages
Japanese (ja)
Other versions
JPS48102089A (US20080094685A1-20080424-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3492972A priority Critical patent/JPS5444679B2/ja
Publication of JPS48102089A publication Critical patent/JPS48102089A/ja
Publication of JPS5444679B2 publication Critical patent/JPS5444679B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
JP3492972A 1972-04-07 1972-04-07 Expired JPS5444679B2 (US20080094685A1-20080424-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3492972A JPS5444679B2 (US20080094685A1-20080424-C00004.png) 1972-04-07 1972-04-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3492972A JPS5444679B2 (US20080094685A1-20080424-C00004.png) 1972-04-07 1972-04-07

Publications (2)

Publication Number Publication Date
JPS48102089A JPS48102089A (US20080094685A1-20080424-C00004.png) 1973-12-21
JPS5444679B2 true JPS5444679B2 (US20080094685A1-20080424-C00004.png) 1979-12-27

Family

ID=12427874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3492972A Expired JPS5444679B2 (US20080094685A1-20080424-C00004.png) 1972-04-07 1972-04-07

Country Status (1)

Country Link
JP (1) JPS5444679B2 (US20080094685A1-20080424-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH066510Y2 (ja) * 1987-07-27 1994-02-16 関西日本電気株式会社 半導体ペレットの剥離装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH066510Y2 (ja) * 1987-07-27 1994-02-16 関西日本電気株式会社 半導体ペレットの剥離装置

Also Published As

Publication number Publication date
JPS48102089A (US20080094685A1-20080424-C00004.png) 1973-12-21

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