JPS5442583B2 - - Google Patents

Info

Publication number
JPS5442583B2
JPS5442583B2 JP9117376A JP9117376A JPS5442583B2 JP S5442583 B2 JPS5442583 B2 JP S5442583B2 JP 9117376 A JP9117376 A JP 9117376A JP 9117376 A JP9117376 A JP 9117376A JP S5442583 B2 JPS5442583 B2 JP S5442583B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9117376A
Other languages
Japanese (ja)
Other versions
JPS5317067A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9117376A priority Critical patent/JPS5317067A/ja
Publication of JPS5317067A publication Critical patent/JPS5317067A/ja
Publication of JPS5442583B2 publication Critical patent/JPS5442583B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Led Devices (AREA)
JP9117376A 1976-07-30 1976-07-30 Vapor phase epitaxial growth method Granted JPS5317067A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9117376A JPS5317067A (en) 1976-07-30 1976-07-30 Vapor phase epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9117376A JPS5317067A (en) 1976-07-30 1976-07-30 Vapor phase epitaxial growth method

Publications (2)

Publication Number Publication Date
JPS5317067A JPS5317067A (en) 1978-02-16
JPS5442583B2 true JPS5442583B2 (US20030199744A1-20031023-C00003.png) 1979-12-14

Family

ID=14019065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9117376A Granted JPS5317067A (en) 1976-07-30 1976-07-30 Vapor phase epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS5317067A (US20030199744A1-20031023-C00003.png)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57198619A (en) * 1981-06-01 1982-12-06 Fujitsu Ltd Vapor growth of compound semiconductor
JPS582294A (ja) * 1981-06-29 1983-01-07 Fujitsu Ltd 気相成長方法
JP2553731B2 (ja) * 1990-04-13 1996-11-13 三菱電機株式会社 半導体光素子

Also Published As

Publication number Publication date
JPS5317067A (en) 1978-02-16

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