JPS5431338B2 - - Google Patents

Info

Publication number
JPS5431338B2
JPS5431338B2 JP6897678A JP6897678A JPS5431338B2 JP S5431338 B2 JPS5431338 B2 JP S5431338B2 JP 6897678 A JP6897678 A JP 6897678A JP 6897678 A JP6897678 A JP 6897678A JP S5431338 B2 JPS5431338 B2 JP S5431338B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6897678A
Other languages
Japanese (ja)
Other versions
JPS53149759A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6897678A priority Critical patent/JPS53149759A/ja
Publication of JPS53149759A publication Critical patent/JPS53149759A/ja
Publication of JPS5431338B2 publication Critical patent/JPS5431338B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP6897678A 1978-06-09 1978-06-09 Method of producing semiconductor silicon wafer Granted JPS53149759A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6897678A JPS53149759A (en) 1978-06-09 1978-06-09 Method of producing semiconductor silicon wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6897678A JPS53149759A (en) 1978-06-09 1978-06-09 Method of producing semiconductor silicon wafer

Publications (2)

Publication Number Publication Date
JPS53149759A JPS53149759A (en) 1978-12-27
JPS5431338B2 true JPS5431338B2 (US08118993-20120221-C00002.png) 1979-10-06

Family

ID=13389203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6897678A Granted JPS53149759A (en) 1978-06-09 1978-06-09 Method of producing semiconductor silicon wafer

Country Status (1)

Country Link
JP (1) JPS53149759A (US08118993-20120221-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0137069Y2 (US08118993-20120221-C00002.png) * 1984-07-04 1989-11-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0137069Y2 (US08118993-20120221-C00002.png) * 1984-07-04 1989-11-09

Also Published As

Publication number Publication date
JPS53149759A (en) 1978-12-27

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