Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/26—Bombardment with radiation
  • H01L21/263—Bombardment with radiation with high-energy radiation
  • H01L21/2633—Bombardment with radiation with high-energy radiation for etching, e.g. sputteretching
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor

Landscapes

• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Power Engineering (AREA)
• Microelectronics & Electronic Packaging (AREA)
• General Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• Computer Hardware Design (AREA)
• Manufacturing & Machinery (AREA)
• High Energy & Nuclear Physics (AREA)
• Toxicology (AREA)
• Health & Medical Sciences (AREA)
• Ceramic Engineering (AREA)
• Electrodes Of Semiconductors (AREA)
• Physical Vapour Deposition (AREA)

Priority Applications (4)

Applications Claiming Priority (1)

Publications (2)

Family

ID=12362650

Family Applications (1)

Country Status (4)

Families Citing this family (10)

Family Cites Families (3)

• 1974
  • 1974-03-25 JP JP3257474A patent/JPS542066B2/ja not_active Expired
• 1975
  • 1975-03-21 US US05/560,880 patent/US3968019A/en not_active Expired - Lifetime
  • 1975-03-24 DE DE19752512951 patent/DE2512951A1/de active Pending
  • 1975-03-24 NL NL7503480A patent/NL7503480A/xx not_active Application Discontinuation

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