JPS5420584A - Air bearing type conveying apparatus - Google Patents

Air bearing type conveying apparatus

Info

Publication number
JPS5420584A
JPS5420584A JP8425877A JP8425877A JPS5420584A JP S5420584 A JPS5420584 A JP S5420584A JP 8425877 A JP8425877 A JP 8425877A JP 8425877 A JP8425877 A JP 8425877A JP S5420584 A JPS5420584 A JP S5420584A
Authority
JP
Japan
Prior art keywords
air bearing
type conveying
bearing type
article
inhibiting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8425877A
Other languages
Japanese (ja)
Inventor
Masato Ishioka
Yoshiharu Shigyo
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8425877A priority Critical patent/JPS5420584A/en
Publication of JPS5420584A publication Critical patent/JPS5420584A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To smoothly discharge an article in an air bearing type conveying apparatus by inhibiting an air bearing effect in the pusher stroke zone for discharging the article.
COPYRIGHT: (C)1979,JPO&Japio
JP8425877A 1977-07-15 1977-07-15 Air bearing type conveying apparatus Pending JPS5420584A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8425877A JPS5420584A (en) 1977-07-15 1977-07-15 Air bearing type conveying apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8425877A JPS5420584A (en) 1977-07-15 1977-07-15 Air bearing type conveying apparatus

Publications (1)

Publication Number Publication Date
JPS5420584A true JPS5420584A (en) 1979-02-16

Family

ID=13825419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8425877A Pending JPS5420584A (en) 1977-07-15 1977-07-15 Air bearing type conveying apparatus

Country Status (1)

Country Link
JP (1) JPS5420584A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4738748A (en) * 1983-09-30 1988-04-19 Fujitsu Limited Plasma processor and method for IC fabrication
JPH02209319A (en) * 1989-02-08 1990-08-20 Toshiba Ceramics Co Ltd Carrier device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4738748A (en) * 1983-09-30 1988-04-19 Fujitsu Limited Plasma processor and method for IC fabrication
JPH02209319A (en) * 1989-02-08 1990-08-20 Toshiba Ceramics Co Ltd Carrier device

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