JPS5418227B2 - - Google Patents
Info
- Publication number
- JPS5418227B2 JPS5418227B2 JP13395473A JP13395473A JPS5418227B2 JP S5418227 B2 JPS5418227 B2 JP S5418227B2 JP 13395473 A JP13395473 A JP 13395473A JP 13395473 A JP13395473 A JP 13395473A JP S5418227 B2 JPS5418227 B2 JP S5418227B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/2633—Bombardment with radiation with high-energy radiation for etching, e.g. sputteretching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- High Energy & Nuclear Physics (AREA)
- Power Engineering (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19722258297 DE2258297C3 (de) | 1972-11-29 | Verfahren zur Herstellung geätzter Strukturen in Substraten durch ätzenden lonenbeschuB mittels Kathodenzerstäubung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4983637A JPS4983637A (US07922777-20110412-C00004.png) | 1974-08-12 |
| JPS5418227B2 true JPS5418227B2 (US07922777-20110412-C00004.png) | 1979-07-05 |
Family
ID=5862937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13395473A Expired JPS5418227B2 (US07922777-20110412-C00004.png) | 1972-11-29 | 1973-11-29 |
Country Status (7)
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4016062A (en) * | 1975-09-11 | 1977-04-05 | International Business Machines Corporation | Method of forming a serrated surface topography |
| US4340276A (en) * | 1978-11-01 | 1982-07-20 | Minnesota Mining And Manufacturing Company | Method of producing a microstructured surface and the article produced thereby |
| JPS55141567A (en) * | 1979-03-27 | 1980-11-05 | Norio Taniguchi | Working method for sharpening blunted tip |
| US4241109A (en) * | 1979-04-30 | 1980-12-23 | Bell Telephone Laboratories, Incorporated | Technique for altering the profile of grating relief patterns |
| US4278493A (en) * | 1980-04-28 | 1981-07-14 | International Business Machines Corporation | Method for cleaning surfaces by ion milling |
| DE3102647A1 (de) * | 1981-01-27 | 1982-08-19 | Siemens AG, 1000 Berlin und 8000 München | Strukturierung von metalloxidmasken, insbesondere durch reaktives ionenstrahlaetzen |
| FR2619457B1 (fr) * | 1987-08-14 | 1989-11-17 | Commissariat Energie Atomique | Procede d'obtention d'un motif notamment en materiau ferromagnetique ayant des flancs de pente differente et tete magnetique comportant un tel motif |
| CA2097388A1 (en) * | 1992-07-16 | 1994-01-17 | Susan Nord Bohlke | Topographical selective patterns |
| US6960510B2 (en) * | 2002-07-01 | 2005-11-01 | International Business Machines Corporation | Method of making sub-lithographic features |
| US7207098B2 (en) * | 2003-06-27 | 2007-04-24 | Seagate Technology Llc | Hard mask method of forming a reader of a magnetic head |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3271286A (en) * | 1964-02-25 | 1966-09-06 | Bell Telephone Labor Inc | Selective removal of material using cathodic sputtering |
| FR1459616A (fr) * | 1964-12-28 | 1966-04-29 | Ibm | Procédé pour obtenir des connexions dans les plaques semiconductrices |
| US3615953A (en) * | 1968-12-17 | 1971-10-26 | Bryan H Hill | Etch-retarding oxide films as a mask for etching |
| US3661747A (en) * | 1969-08-11 | 1972-05-09 | Bell Telephone Labor Inc | Method for etching thin film materials by direct cathodic back sputtering |
| JPS5146001B2 (US07922777-20110412-C00004.png) * | 1971-09-20 | 1976-12-07 | ||
| US3791952A (en) * | 1972-07-24 | 1974-02-12 | Bell Telephone Labor Inc | Method for neutralizing charge in semiconductor bodies and dielectric coatings induced by cathodic etching |
-
1973
- 1973-11-26 GB GB5471973A patent/GB1414029A/en not_active Expired
- 1973-11-26 NL NL7316100A patent/NL7316100A/xx unknown
- 1973-11-26 IT IT70466/73A patent/IT999819B/it active
- 1973-11-26 CA CA186,700A patent/CA1009607A/en not_active Expired
- 1973-11-27 US US419434A patent/US3904462A/en not_active Expired - Lifetime
- 1973-11-28 FR FR7342302A patent/FR2208002B1/fr not_active Expired
- 1973-11-29 JP JP13395473A patent/JPS5418227B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CA1009607A (en) | 1977-05-03 |
| DE2258297A1 (de) | 1974-06-06 |
| US3904462A (en) | 1975-09-09 |
| FR2208002B1 (US07922777-20110412-C00004.png) | 1976-11-19 |
| NL7316100A (US07922777-20110412-C00004.png) | 1974-05-31 |
| GB1414029A (en) | 1975-11-12 |
| IT999819B (it) | 1976-03-10 |
| DE2258297B2 (de) | 1975-07-17 |
| FR2208002A1 (US07922777-20110412-C00004.png) | 1974-06-21 |
| JPS4983637A (US07922777-20110412-C00004.png) | 1974-08-12 |
