JPS5416748B2 - - Google Patents
Info
- Publication number
- JPS5416748B2 JPS5416748B2 JP6198372A JP6198372A JPS5416748B2 JP S5416748 B2 JPS5416748 B2 JP S5416748B2 JP 6198372 A JP6198372 A JP 6198372A JP 6198372 A JP6198372 A JP 6198372A JP S5416748 B2 JPS5416748 B2 JP S5416748B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6198372A JPS5416748B2 (https=) | 1972-06-21 | 1972-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6198372A JPS5416748B2 (https=) | 1972-06-21 | 1972-06-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4923646A JPS4923646A (https=) | 1974-03-02 |
| JPS5416748B2 true JPS5416748B2 (https=) | 1979-06-25 |
Family
ID=13186914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6198372A Expired JPS5416748B2 (https=) | 1972-06-21 | 1972-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5416748B2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210018145A (ko) | 2019-08-09 | 2021-02-17 | 도쿄엘렉트론가부시키가이샤 | 배치대 및 기판 처리 장치 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5127390B2 (https=) * | 1971-11-10 | 1976-08-12 |
-
1972
- 1972-06-21 JP JP6198372A patent/JPS5416748B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210018145A (ko) | 2019-08-09 | 2021-02-17 | 도쿄엘렉트론가부시키가이샤 | 배치대 및 기판 처리 장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4923646A (https=) | 1974-03-02 |