JPS5416280B2 - - Google Patents
Info
- Publication number
- JPS5416280B2 JPS5416280B2 JP721900A JP190072A JPS5416280B2 JP S5416280 B2 JPS5416280 B2 JP S5416280B2 JP 721900 A JP721900 A JP 721900A JP 190072 A JP190072 A JP 190072A JP S5416280 B2 JPS5416280 B2 JP S5416280B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP721900A JPS5416280B2 (en) | 1971-12-30 | 1971-12-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP721900A JPS5416280B2 (en) | 1971-12-30 | 1971-12-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4874393A JPS4874393A (en) | 1973-10-06 |
| JPS5416280B2 true JPS5416280B2 (en) | 1979-06-21 |
Family
ID=11514441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP721900A Expired JPS5416280B2 (en) | 1971-12-30 | 1971-12-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5416280B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9972504B2 (en) | 2015-08-07 | 2018-05-15 | Lam Research Corporation | Atomic layer etching of tungsten for enhanced tungsten deposition fill |
| US9991128B2 (en) | 2016-02-05 | 2018-06-05 | Lam Research Corporation | Atomic layer etching in continuous plasma |
| US10096487B2 (en) | 2015-08-19 | 2018-10-09 | Lam Research Corporation | Atomic layer etching of tungsten and other metals |
| US10998187B2 (en) | 2017-04-19 | 2021-05-04 | Lam Research Corporation | Selective deposition with atomic layer etch reset |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50154379U (en) * | 1974-06-06 | 1975-12-22 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3017302A (en) * | 1958-01-31 | 1962-01-16 | Milprint Inc | Art of packaging commodities |
| US3625348A (en) * | 1969-08-08 | 1971-12-07 | Dow Chemical Co | Packaging articles in containers having self-adhering inner layers |
-
1971
- 1971-12-30 JP JP721900A patent/JPS5416280B2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3017302A (en) * | 1958-01-31 | 1962-01-16 | Milprint Inc | Art of packaging commodities |
| US3625348A (en) * | 1969-08-08 | 1971-12-07 | Dow Chemical Co | Packaging articles in containers having self-adhering inner layers |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9972504B2 (en) | 2015-08-07 | 2018-05-15 | Lam Research Corporation | Atomic layer etching of tungsten for enhanced tungsten deposition fill |
| US10096487B2 (en) | 2015-08-19 | 2018-10-09 | Lam Research Corporation | Atomic layer etching of tungsten and other metals |
| US9991128B2 (en) | 2016-02-05 | 2018-06-05 | Lam Research Corporation | Atomic layer etching in continuous plasma |
| US10998187B2 (en) | 2017-04-19 | 2021-05-04 | Lam Research Corporation | Selective deposition with atomic layer etch reset |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4874393A (en) | 1973-10-06 |