JPS5416178A - Forming method of electrode - Google Patents

Forming method of electrode

Info

Publication number
JPS5416178A
JPS5416178A JP8044377A JP8044377A JPS5416178A JP S5416178 A JPS5416178 A JP S5416178A JP 8044377 A JP8044377 A JP 8044377A JP 8044377 A JP8044377 A JP 8044377A JP S5416178 A JPS5416178 A JP S5416178A
Authority
JP
Japan
Prior art keywords
electrode
forming method
covering
shallow
poly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8044377A
Other languages
Japanese (ja)
Inventor
Hironori Kitabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP8044377A priority Critical patent/JPS5416178A/en
Publication of JPS5416178A publication Critical patent/JPS5416178A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To readily produce a device having shallow junctions and Schottky barriers by selectively covering shallow pn junction parts with poly-Si and covering these with Al alone simultaneously with covering of exposed Si and surface.
COPYRIGHT: (C)1979,JPO&Japio
JP8044377A 1977-07-07 1977-07-07 Forming method of electrode Pending JPS5416178A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8044377A JPS5416178A (en) 1977-07-07 1977-07-07 Forming method of electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8044377A JPS5416178A (en) 1977-07-07 1977-07-07 Forming method of electrode

Publications (1)

Publication Number Publication Date
JPS5416178A true JPS5416178A (en) 1979-02-06

Family

ID=13718393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8044377A Pending JPS5416178A (en) 1977-07-07 1977-07-07 Forming method of electrode

Country Status (1)

Country Link
JP (1) JPS5416178A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5580808A (en) * 1992-07-30 1996-12-03 Canon Kabushiki Kaisha Method of manufacturing a ROM device having contact holes treated with hydrogen atoms and energy beam

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS511586A (en) * 1974-06-26 1976-01-08 Toyo Kogyo Co KARIUGOMUTOKINZOKUTONO SETSUCHAKUHOHO

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS511586A (en) * 1974-06-26 1976-01-08 Toyo Kogyo Co KARIUGOMUTOKINZOKUTONO SETSUCHAKUHOHO

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5580808A (en) * 1992-07-30 1996-12-03 Canon Kabushiki Kaisha Method of manufacturing a ROM device having contact holes treated with hydrogen atoms and energy beam

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