JPS5416178A - Forming method of electrode - Google Patents
Forming method of electrodeInfo
- Publication number
- JPS5416178A JPS5416178A JP8044377A JP8044377A JPS5416178A JP S5416178 A JPS5416178 A JP S5416178A JP 8044377 A JP8044377 A JP 8044377A JP 8044377 A JP8044377 A JP 8044377A JP S5416178 A JPS5416178 A JP S5416178A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- forming method
- covering
- shallow
- poly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To readily produce a device having shallow junctions and Schottky barriers by selectively covering shallow pn junction parts with poly-Si and covering these with Al alone simultaneously with covering of exposed Si and surface.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8044377A JPS5416178A (en) | 1977-07-07 | 1977-07-07 | Forming method of electrode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8044377A JPS5416178A (en) | 1977-07-07 | 1977-07-07 | Forming method of electrode |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5416178A true JPS5416178A (en) | 1979-02-06 |
Family
ID=13718393
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8044377A Pending JPS5416178A (en) | 1977-07-07 | 1977-07-07 | Forming method of electrode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5416178A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5580808A (en) * | 1992-07-30 | 1996-12-03 | Canon Kabushiki Kaisha | Method of manufacturing a ROM device having contact holes treated with hydrogen atoms and energy beam |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS511586A (en) * | 1974-06-26 | 1976-01-08 | Toyo Kogyo Co | KARIUGOMUTOKINZOKUTONO SETSUCHAKUHOHO |
-
1977
- 1977-07-07 JP JP8044377A patent/JPS5416178A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS511586A (en) * | 1974-06-26 | 1976-01-08 | Toyo Kogyo Co | KARIUGOMUTOKINZOKUTONO SETSUCHAKUHOHO |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5580808A (en) * | 1992-07-30 | 1996-12-03 | Canon Kabushiki Kaisha | Method of manufacturing a ROM device having contact holes treated with hydrogen atoms and energy beam |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS542679A (en) | Nonvoltile semiconductor memory device | |
JPS53124087A (en) | Manufacture of semiconductor device | |
JPS5396766A (en) | Semiconductor device | |
JPS5416178A (en) | Forming method of electrode | |
JPS5585077A (en) | Semi-conductor apparatus | |
JPS547883A (en) | Semiconductor device and its manufacture | |
JPS52128063A (en) | Manufacture of semiconductor device | |
JPS51146192A (en) | Diode device fabrication method | |
JPS5440575A (en) | Semiconductor device | |
JPS534469A (en) | Semiconductor device | |
JPS5341181A (en) | Semiconductor device | |
JPS5314585A (en) | Semiconductor device | |
JPS5421283A (en) | Manufacture for semiconductor device | |
JPS53139476A (en) | Manufacture of semiconductor device | |
JPS53116073A (en) | Semiconductor device | |
JPS528787A (en) | Semiconductor device process | |
JPS5411671A (en) | Sealing method of semiconductor device | |
JPS5432983A (en) | Manufacture of semiconductor device | |
JPS5387672A (en) | Semiconductor device | |
JPS53132260A (en) | Production of semiconductor device | |
JPS548834A (en) | Semiconductor rectifying device | |
JPS53125774A (en) | Bipolar transistor and its manufacture | |
JPS547879A (en) | Manufacture for semiconductor device | |
JPS5380976A (en) | Semiconductor device | |
JPS5431274A (en) | Manufacture of semiconductor device |