JPS54153314A - Regenerative apparatus for cryopump - Google Patents
Regenerative apparatus for cryopumpInfo
- Publication number
- JPS54153314A JPS54153314A JP6094278A JP6094278A JPS54153314A JP S54153314 A JPS54153314 A JP S54153314A JP 6094278 A JP6094278 A JP 6094278A JP 6094278 A JP6094278 A JP 6094278A JP S54153314 A JPS54153314 A JP S54153314A
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- regenerative apparatus
- regenerative
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6094278A JPS595798B2 (ja) | 1978-05-24 | 1978-05-24 | クライオポンプの再生装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6094278A JPS595798B2 (ja) | 1978-05-24 | 1978-05-24 | クライオポンプの再生装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54153314A true JPS54153314A (en) | 1979-12-03 |
JPS595798B2 JPS595798B2 (ja) | 1984-02-07 |
Family
ID=13156927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6094278A Expired JPS595798B2 (ja) | 1978-05-24 | 1978-05-24 | クライオポンプの再生装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS595798B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS588280A (ja) * | 1981-07-04 | 1983-01-18 | Ulvac Corp | 真空排気装置 |
JPH01179182U (ja) * | 1988-02-16 | 1989-12-22 |
-
1978
- 1978-05-24 JP JP6094278A patent/JPS595798B2/ja not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS588280A (ja) * | 1981-07-04 | 1983-01-18 | Ulvac Corp | 真空排気装置 |
JPS6156434B2 (ja) * | 1981-07-04 | 1986-12-02 | Ulvac Corp | |
JPH01179182U (ja) * | 1988-02-16 | 1989-12-22 |
Also Published As
Publication number | Publication date |
---|---|
JPS595798B2 (ja) | 1984-02-07 |
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