JPS54140564A - Laminar flow meter - Google Patents

Laminar flow meter

Info

Publication number
JPS54140564A
JPS54140564A JP4845778A JP4845778A JPS54140564A JP S54140564 A JPS54140564 A JP S54140564A JP 4845778 A JP4845778 A JP 4845778A JP 4845778 A JP4845778 A JP 4845778A JP S54140564 A JPS54140564 A JP S54140564A
Authority
JP
Japan
Prior art keywords
flow meter
laminar flow
laminar
meter
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4845778A
Other languages
Japanese (ja)
Inventor
Tetsuo Mutoo
Akinori Saitou
Kiyomi Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Priority to JP4845778A priority Critical patent/JPS54140564A/en
Publication of JPS54140564A publication Critical patent/JPS54140564A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP4845778A 1978-04-24 1978-04-24 Laminar flow meter Pending JPS54140564A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4845778A JPS54140564A (en) 1978-04-24 1978-04-24 Laminar flow meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4845778A JPS54140564A (en) 1978-04-24 1978-04-24 Laminar flow meter

Publications (1)

Publication Number Publication Date
JPS54140564A true JPS54140564A (en) 1979-10-31

Family

ID=12803879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4845778A Pending JPS54140564A (en) 1978-04-24 1978-04-24 Laminar flow meter

Country Status (1)

Country Link
JP (1) JPS54140564A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5810705U (en) * 1981-07-10 1983-01-24 日本光電工業株式会社 Resistance tube of pneumotachograph
JPH1194603A (en) * 1997-06-24 1999-04-09 Balzers Ag Method for monitoring actual flow of gas to vacuum facility, and vacuum processing device
WO2016185815A1 (en) * 2015-05-21 2016-11-24 柴田科学株式会社 Flowmeter-equipped pump, and method for controlling flow rate through pump
JP2017181231A (en) * 2016-03-30 2017-10-05 パナソニックＩｐマネジメント株式会社 Flow rate measuring device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5810705U (en) * 1981-07-10 1983-01-24 日本光電工業株式会社 Resistance tube of pneumotachograph
JPH026330Y2 (en) * 1981-07-10 1990-02-15
JPH1194603A (en) * 1997-06-24 1999-04-09 Balzers Ag Method for monitoring actual flow of gas to vacuum facility, and vacuum processing device
WO2016185815A1 (en) * 2015-05-21 2016-11-24 柴田科学株式会社 Flowmeter-equipped pump, and method for controlling flow rate through pump
JPWO2016185815A1 (en) * 2015-05-21 2018-03-08 柴田科学株式会社 Pump with flow meter and pump flow control method
JP2017181231A (en) * 2016-03-30 2017-10-05 パナソニックＩｐマネジメント株式会社 Flow rate measuring device

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