JPS54121059A - Automatic positioning method for pelletized wafer - Google Patents

Automatic positioning method for pelletized wafer

Info

Publication number
JPS54121059A
JPS54121059A JP2893578A JP2893578A JPS54121059A JP S54121059 A JPS54121059 A JP S54121059A JP 2893578 A JP2893578 A JP 2893578A JP 2893578 A JP2893578 A JP 2893578A JP S54121059 A JPS54121059 A JP S54121059A
Authority
JP
Japan
Prior art keywords
wafer
given
pelletized
automatic positioning
9aw9d
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2893578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6128216B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Aoyama
Takeshi Tamai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP2893578A priority Critical patent/JPS54121059A/ja
Publication of JPS54121059A publication Critical patent/JPS54121059A/ja
Publication of JPS6128216B2 publication Critical patent/JPS6128216B2/ja
Granted legal-status Critical Current

Links

JP2893578A 1978-03-13 1978-03-13 Automatic positioning method for pelletized wafer Granted JPS54121059A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2893578A JPS54121059A (en) 1978-03-13 1978-03-13 Automatic positioning method for pelletized wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2893578A JPS54121059A (en) 1978-03-13 1978-03-13 Automatic positioning method for pelletized wafer

Publications (2)

Publication Number Publication Date
JPS54121059A true JPS54121059A (en) 1979-09-19
JPS6128216B2 JPS6128216B2 (enrdf_load_stackoverflow) 1986-06-28

Family

ID=12262249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2893578A Granted JPS54121059A (en) 1978-03-13 1978-03-13 Automatic positioning method for pelletized wafer

Country Status (1)

Country Link
JP (1) JPS54121059A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6265436A (ja) * 1985-09-18 1987-03-24 Tokyo Sokuhan Kk ダイボンダにおけるウエハ−位置制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6265436A (ja) * 1985-09-18 1987-03-24 Tokyo Sokuhan Kk ダイボンダにおけるウエハ−位置制御方法

Also Published As

Publication number Publication date
JPS6128216B2 (enrdf_load_stackoverflow) 1986-06-28

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