JPS5411228B2 - - Google Patents

Info

Publication number
JPS5411228B2
JPS5411228B2 JP6415875A JP6415875A JPS5411228B2 JP S5411228 B2 JPS5411228 B2 JP S5411228B2 JP 6415875 A JP6415875 A JP 6415875A JP 6415875 A JP6415875 A JP 6415875A JP S5411228 B2 JPS5411228 B2 JP S5411228B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6415875A
Other languages
Japanese (ja)
Other versions
JPS51142271A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6415875A priority Critical patent/JPS51142271A/ja
Publication of JPS51142271A publication Critical patent/JPS51142271A/ja
Publication of JPS5411228B2 publication Critical patent/JPS5411228B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP6415875A 1975-05-30 1975-05-30 Diffusion-furnace pipe for forming a semiconductor oxide film Granted JPS51142271A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6415875A JPS51142271A (en) 1975-05-30 1975-05-30 Diffusion-furnace pipe for forming a semiconductor oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6415875A JPS51142271A (en) 1975-05-30 1975-05-30 Diffusion-furnace pipe for forming a semiconductor oxide film

Publications (2)

Publication Number Publication Date
JPS51142271A JPS51142271A (en) 1976-12-07
JPS5411228B2 true JPS5411228B2 (enrdf_load_stackoverflow) 1979-05-12

Family

ID=13249972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6415875A Granted JPS51142271A (en) 1975-05-30 1975-05-30 Diffusion-furnace pipe for forming a semiconductor oxide film

Country Status (1)

Country Link
JP (1) JPS51142271A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS51142271A (en) 1976-12-07

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