JPS5391458U - - Google Patents
Info
- Publication number
- JPS5391458U JPS5391458U JP17571876U JP17571876U JPS5391458U JP S5391458 U JPS5391458 U JP S5391458U JP 17571876 U JP17571876 U JP 17571876U JP 17571876 U JP17571876 U JP 17571876U JP S5391458 U JPS5391458 U JP S5391458U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976175718U JPS5752858Y2 (https=) | 1976-12-27 | 1976-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976175718U JPS5752858Y2 (https=) | 1976-12-27 | 1976-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5391458U true JPS5391458U (https=) | 1978-07-26 |
| JPS5752858Y2 JPS5752858Y2 (https=) | 1982-11-16 |
Family
ID=28783112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976175718U Expired JPS5752858Y2 (https=) | 1976-12-27 | 1976-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5752858Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220015902A (ko) | 2019-05-31 | 2022-02-08 | 가부시키가이샤 와데코 | 고로 내 장입물의 표면 프로필 검출 장치 및 조업 방법 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5184568A (en) * | 1975-01-22 | 1976-07-23 | Nippon Electron Optics Lab | Denkaihoshutsugatadenshiju |
-
1976
- 1976-12-27 JP JP1976175718U patent/JPS5752858Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5184568A (en) * | 1975-01-22 | 1976-07-23 | Nippon Electron Optics Lab | Denkaihoshutsugatadenshiju |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220015902A (ko) | 2019-05-31 | 2022-02-08 | 가부시키가이샤 와데코 | 고로 내 장입물의 표면 프로필 검출 장치 및 조업 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5752858Y2 (https=) | 1982-11-16 |