JPS5384561A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5384561A
JPS5384561A JP16029476A JP16029476A JPS5384561A JP S5384561 A JPS5384561 A JP S5384561A JP 16029476 A JP16029476 A JP 16029476A JP 16029476 A JP16029476 A JP 16029476A JP S5384561 A JPS5384561 A JP S5384561A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
developing
substrate
high temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16029476A
Other languages
Japanese (ja)
Other versions
JPS5610784B2 (en
Inventor
Takashi Ito
Takao Nozaki
Masaichi Shinoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16029476A priority Critical patent/JPS5384561A/en
Publication of JPS5384561A publication Critical patent/JPS5384561A/en
Publication of JPS5610784B2 publication Critical patent/JPS5610784B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To manufacture uniform Si3N4 on the Si substrate, by developing the N atom activated through high temperature heating of N2H4.
COPYRIGHT: (C)1978,JPO&Japio
JP16029476A 1976-12-29 1976-12-29 Manufacture for semiconductor device Granted JPS5384561A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16029476A JPS5384561A (en) 1976-12-29 1976-12-29 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16029476A JPS5384561A (en) 1976-12-29 1976-12-29 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS5384561A true JPS5384561A (en) 1978-07-26
JPS5610784B2 JPS5610784B2 (en) 1981-03-10

Family

ID=15711854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16029476A Granted JPS5384561A (en) 1976-12-29 1976-12-29 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5384561A (en)

Also Published As

Publication number Publication date
JPS5610784B2 (en) 1981-03-10

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