JPS5381448U - - Google Patents

Info

Publication number
JPS5381448U
JPS5381448U JP16525876U JP16525876U JPS5381448U JP S5381448 U JPS5381448 U JP S5381448U JP 16525876 U JP16525876 U JP 16525876U JP 16525876 U JP16525876 U JP 16525876U JP S5381448 U JPS5381448 U JP S5381448U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16525876U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16525876U priority Critical patent/JPS5381448U/ja
Publication of JPS5381448U publication Critical patent/JPS5381448U/ja
Pending legal-status Critical Current

Links

JP16525876U 1976-12-08 1976-12-08 Pending JPS5381448U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16525876U JPS5381448U (US20100223739A1-20100909-C00005.png) 1976-12-08 1976-12-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16525876U JPS5381448U (US20100223739A1-20100909-C00005.png) 1976-12-08 1976-12-08

Publications (1)

Publication Number Publication Date
JPS5381448U true JPS5381448U (US20100223739A1-20100909-C00005.png) 1978-07-06

Family

ID=28772995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16525876U Pending JPS5381448U (US20100223739A1-20100909-C00005.png) 1976-12-08 1976-12-08

Country Status (1)

Country Link
JP (1) JPS5381448U (US20100223739A1-20100909-C00005.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932247B1 (US20100223739A1-20100909-C00005.png) * 1969-04-09 1974-08-29
JPS51118134A (en) * 1975-04-11 1976-10-16 Hitachi Ltd Air supplying and exausting chamber

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932247B1 (US20100223739A1-20100909-C00005.png) * 1969-04-09 1974-08-29
JPS51118134A (en) * 1975-04-11 1976-10-16 Hitachi Ltd Air supplying and exausting chamber

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