JPS5375867A - Mask aligment apparatus - Google Patents

Mask aligment apparatus

Info

Publication number
JPS5375867A
JPS5375867A JP15091776A JP15091776A JPS5375867A JP S5375867 A JPS5375867 A JP S5375867A JP 15091776 A JP15091776 A JP 15091776A JP 15091776 A JP15091776 A JP 15091776A JP S5375867 A JPS5375867 A JP S5375867A
Authority
JP
Japan
Prior art keywords
chuck
aligment
mask
driving
proportinal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15091776A
Other languages
Japanese (ja)
Other versions
JPS6013301B2 (en
Inventor
Susumu Komoriya
Hiroshi Nishizuka
Hiroshi Maejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP51150917A priority Critical patent/JPS6013301B2/ja
Publication of JPS5375867A publication Critical patent/JPS5375867A/en
Publication of JPS6013301B2 publication Critical patent/JPS6013301B2/ja
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To obtain accurate mask position and accurately control chuck vertical movements based on this by elastically and vertically moveably holding a wafer chuck with plate springs and detecting the change points of a proportinal constant which defines the proportional relation between the movement and driving power of the chuck at the time of driving.
COPYRIGHT: (C)1978,JPO&Japio
JP51150917A 1976-12-17 1976-12-17 Expired JPS6013301B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51150917A JPS6013301B2 (en) 1976-12-17 1976-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51150917A JPS6013301B2 (en) 1976-12-17 1976-12-17

Publications (2)

Publication Number Publication Date
JPS5375867A true JPS5375867A (en) 1978-07-05
JPS6013301B2 JPS6013301B2 (en) 1985-04-06

Family

ID=15507213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51150917A Expired JPS6013301B2 (en) 1976-12-17 1976-12-17

Country Status (1)

Country Link
JP (1) JPS6013301B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527656A (en) * 1978-08-21 1980-02-27 Hitachi Ltd Method and device of sticking photomask and wafer together
JPS55121639A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Control method for push force of mask and wafer
JPS6063928A (en) * 1984-07-04 1985-04-12 Hitachi Ltd Contact exposure device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527656A (en) * 1978-08-21 1980-02-27 Hitachi Ltd Method and device of sticking photomask and wafer together
JPS6260810B2 (en) * 1978-08-21 1987-12-18 Hitachi Ltd
JPS55121639A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Control method for push force of mask and wafer
JPS6063928A (en) * 1984-07-04 1985-04-12 Hitachi Ltd Contact exposure device

Also Published As

Publication number Publication date
JPS6013301B2 (en) 1985-04-06

Similar Documents

Publication Publication Date Title
JPS52145949A (en) Speed control device for elevator
JPS51147179A (en) Method of munufacturing of semiconductor device
JPS5375867A (en) Mask aligment apparatus
JPS52110599A (en) Vehicle position detection device
JPS5336845A (en) Device for detecting elevator load
JPS51139737A (en) Measuring method for magnetic bubble devices
JPS62254426A (en) Paralleling device
JPS5232186A (en) Spherical surface processing device
JPS5373762A (en) Finely moving device for movable machine
JPS52143771A (en) Aligning method for reticle datum plane
JPS52137591A (en) Reactor fuel exchanging system
JPS5211058A (en) Ship position determining system trough direction measurement
JPS52127589A (en) Nuclear fuel gripping device
JPS51120391A (en) Stop control device for moving body
JPS5311458A (en) Device for positioning manipulator
JPH03213279A (en) Travel controller for wall traveling robot and method thereof
JPS5238697A (en) Machining apparatus using chrged corpuscular rays
JPS51124783A (en) A positioning control apparatus
JPS5244480A (en) Improcess measuring device for non-circula material
JPS51132084A (en) Electron beam exposure method
JPS52115983A (en) Fixed position driving controller
JPS51147348A (en) Photoelectronic microscope
JPS5288904A (en) Apparatus for stopping vehicle at constant position
JPS5245959A (en) Method for measuring distance from moving body
JPS5340173A (en) Transfer body position cotnroller