JPS5375068U - - Google Patents

Info

Publication number
JPS5375068U
JPS5375068U JP15699976U JP15699976U JPS5375068U JP S5375068 U JPS5375068 U JP S5375068U JP 15699976 U JP15699976 U JP 15699976U JP 15699976 U JP15699976 U JP 15699976U JP S5375068 U JPS5375068 U JP S5375068U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15699976U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15699976U priority Critical patent/JPS5375068U/ja
Publication of JPS5375068U publication Critical patent/JPS5375068U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP15699976U 1976-11-25 1976-11-25 Pending JPS5375068U (US06580902-20030617-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15699976U JPS5375068U (US06580902-20030617-M00005.png) 1976-11-25 1976-11-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15699976U JPS5375068U (US06580902-20030617-M00005.png) 1976-11-25 1976-11-25

Publications (1)

Publication Number Publication Date
JPS5375068U true JPS5375068U (US06580902-20030617-M00005.png) 1978-06-22

Family

ID=28765046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15699976U Pending JPS5375068U (US06580902-20030617-M00005.png) 1976-11-25 1976-11-25

Country Status (1)

Country Link
JP (1) JPS5375068U (US06580902-20030617-M00005.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58138918U (ja) * 1982-03-12 1983-09-19 中興化成工業株式会社 レンズ等の洗浄用支持装置
JPH07169731A (ja) * 1993-12-14 1995-07-04 Shin Etsu Handotai Co Ltd ウェーハ洗浄槽

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58138918U (ja) * 1982-03-12 1983-09-19 中興化成工業株式会社 レンズ等の洗浄用支持装置
JPH07169731A (ja) * 1993-12-14 1995-07-04 Shin Etsu Handotai Co Ltd ウェーハ洗浄槽

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