JPS5346692B2 - - Google Patents
Info
- Publication number
- JPS5346692B2 JPS5346692B2 JP14562575A JP14562575A JPS5346692B2 JP S5346692 B2 JPS5346692 B2 JP S5346692B2 JP 14562575 A JP14562575 A JP 14562575A JP 14562575 A JP14562575 A JP 14562575A JP S5346692 B2 JPS5346692 B2 JP S5346692B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14562575A JPS5269269A (en) | 1975-12-05 | 1975-12-05 | Photomask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14562575A JPS5269269A (en) | 1975-12-05 | 1975-12-05 | Photomask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5269269A JPS5269269A (en) | 1977-06-08 |
| JPS5346692B2 true JPS5346692B2 (forum.php) | 1978-12-15 |
Family
ID=15389329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14562575A Granted JPS5269269A (en) | 1975-12-05 | 1975-12-05 | Photomask |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5269269A (forum.php) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61173251A (ja) * | 1985-01-28 | 1986-08-04 | Mitsubishi Electric Corp | フオトマスクの製造方法 |
| JPS6252551A (ja) * | 1985-08-30 | 1987-03-07 | Mitsubishi Electric Corp | フオトマスク材料 |
| JPS6252550A (ja) * | 1985-08-30 | 1987-03-07 | Mitsubishi Electric Corp | フオトマスク材料 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4948269A (forum.php) * | 1972-09-14 | 1974-05-10 |
-
1975
- 1975-12-05 JP JP14562575A patent/JPS5269269A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5269269A (en) | 1977-06-08 |