JPS5336758B2 - - Google Patents

Info

Publication number
JPS5336758B2
JPS5336758B2 JP5433872A JP5433872A JPS5336758B2 JP S5336758 B2 JPS5336758 B2 JP S5336758B2 JP 5433872 A JP5433872 A JP 5433872A JP 5433872 A JP5433872 A JP 5433872A JP S5336758 B2 JPS5336758 B2 JP S5336758B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5433872A
Other languages
Japanese (ja)
Other versions
JPS4911578A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5433872A priority Critical patent/JPS5336758B2/ja
Priority to US00362733A priority patent/US3821545A/en
Priority to GB2501473A priority patent/GB1425610A/en
Publication of JPS4911578A publication Critical patent/JPS4911578A/ja
Publication of JPS5336758B2 publication Critical patent/JPS5336758B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
JP5433872A 1972-05-26 1972-06-02 Expired JPS5336758B2 (enrdf_load_stackoverflow)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP5433872A JPS5336758B2 (enrdf_load_stackoverflow) 1972-06-02 1972-06-02
US00362733A US3821545A (en) 1972-05-26 1973-05-22 Mask alignment in manufacturing semiconductor integrated circuits
GB2501473A GB1425610A (en) 1972-05-26 1973-05-24 Mask alignment in manufacturing semiconductor integrated circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5433872A JPS5336758B2 (enrdf_load_stackoverflow) 1972-06-02 1972-06-02

Publications (2)

Publication Number Publication Date
JPS4911578A JPS4911578A (enrdf_load_stackoverflow) 1974-02-01
JPS5336758B2 true JPS5336758B2 (enrdf_load_stackoverflow) 1978-10-04

Family

ID=12967804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5433872A Expired JPS5336758B2 (enrdf_load_stackoverflow) 1972-05-26 1972-06-02

Country Status (1)

Country Link
JP (1) JPS5336758B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022495B2 (ja) * 1975-01-07 1985-06-03 キヤノン株式会社 アライメント用キ−・パタ−ン保護方法
JPS5742179A (en) * 1980-08-27 1982-03-09 Nec Corp Semiconductor device with recognition pattern
JPS60245224A (ja) * 1984-05-21 1985-12-05 Oki Electric Ind Co Ltd 半導体装置製造用マスク合せ方法

Also Published As

Publication number Publication date
JPS4911578A (enrdf_load_stackoverflow) 1974-02-01

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