JPS5327197A - Ion etching device - Google Patents

Ion etching device

Info

Publication number
JPS5327197A
JPS5327197A JP10114876A JP10114876A JPS5327197A JP S5327197 A JPS5327197 A JP S5327197A JP 10114876 A JP10114876 A JP 10114876A JP 10114876 A JP10114876 A JP 10114876A JP S5327197 A JPS5327197 A JP S5327197A
Authority
JP
Japan
Prior art keywords
ion etching
etching device
ion
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10114876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5731654B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eikoo Enjiniaringu Kk
Original Assignee
Eikoo Enjiniaringu Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eikoo Enjiniaringu Kk filed Critical Eikoo Enjiniaringu Kk
Priority to JP10114876A priority Critical patent/JPS5327197A/ja
Publication of JPS5327197A publication Critical patent/JPS5327197A/ja
Publication of JPS5731654B2 publication Critical patent/JPS5731654B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • Drying Of Semiconductors (AREA)
JP10114876A 1976-08-26 1976-08-26 Ion etching device Granted JPS5327197A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10114876A JPS5327197A (en) 1976-08-26 1976-08-26 Ion etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10114876A JPS5327197A (en) 1976-08-26 1976-08-26 Ion etching device

Publications (2)

Publication Number Publication Date
JPS5327197A true JPS5327197A (en) 1978-03-14
JPS5731654B2 JPS5731654B2 (enrdf_load_stackoverflow) 1982-07-06

Family

ID=14292973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10114876A Granted JPS5327197A (en) 1976-08-26 1976-08-26 Ion etching device

Country Status (1)

Country Link
JP (1) JPS5327197A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5731654B2 (enrdf_load_stackoverflow) 1982-07-06

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