JPS5321271B2 - - Google Patents
Info
- Publication number
- JPS5321271B2 JPS5321271B2 JP9244472A JP9244472A JPS5321271B2 JP S5321271 B2 JPS5321271 B2 JP S5321271B2 JP 9244472 A JP9244472 A JP 9244472A JP 9244472 A JP9244472 A JP 9244472A JP S5321271 B2 JPS5321271 B2 JP S5321271B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9244472A JPS5321271B2 (https=) | 1972-09-14 | 1972-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9244472A JPS5321271B2 (https=) | 1972-09-14 | 1972-09-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4949576A JPS4949576A (https=) | 1974-05-14 |
| JPS5321271B2 true JPS5321271B2 (https=) | 1978-07-01 |
Family
ID=14054569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9244472A Expired JPS5321271B2 (https=) | 1972-09-14 | 1972-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5321271B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE8717448U1 (de) * | 1987-02-06 | 1988-12-29 | Dr. Johannes Heidenhain Gmbh, 83301 Traunreut | Bestrahlungsmaske zur lithographischen Erzeugung von Mustern |
-
1972
- 1972-09-14 JP JP9244472A patent/JPS5321271B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4949576A (https=) | 1974-05-14 |