JPS5316579A - Electron beam exposure apparatus - Google Patents

Electron beam exposure apparatus

Info

Publication number
JPS5316579A
JPS5316579A JP9075276A JP9075276A JPS5316579A JP S5316579 A JPS5316579 A JP S5316579A JP 9075276 A JP9075276 A JP 9075276A JP 9075276 A JP9075276 A JP 9075276A JP S5316579 A JPS5316579 A JP S5316579A
Authority
JP
Japan
Prior art keywords
electron beam
exposure apparatus
beam exposure
slits
radiate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9075276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5320393B2 (enrdf_load_stackoverflow
Inventor
Hidekazu Goto
Takashi Soma
Masanori Idesawa
Moriyuki Isobe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
RIKEN
Original Assignee
Jeol Ltd
Nihon Denshi KK
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, RIKEN filed Critical Jeol Ltd
Priority to JP9075276A priority Critical patent/JPS5316579A/ja
Publication of JPS5316579A publication Critical patent/JPS5316579A/ja
Publication of JPS5320393B2 publication Critical patent/JPS5320393B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP9075276A 1976-07-29 1976-07-29 Electron beam exposure apparatus Granted JPS5316579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9075276A JPS5316579A (en) 1976-07-29 1976-07-29 Electron beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9075276A JPS5316579A (en) 1976-07-29 1976-07-29 Electron beam exposure apparatus

Publications (2)

Publication Number Publication Date
JPS5316579A true JPS5316579A (en) 1978-02-15
JPS5320393B2 JPS5320393B2 (enrdf_load_stackoverflow) 1978-06-26

Family

ID=14007326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9075276A Granted JPS5316579A (en) 1976-07-29 1976-07-29 Electron beam exposure apparatus

Country Status (1)

Country Link
JP (1) JPS5316579A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5320393B2 (enrdf_load_stackoverflow) 1978-06-26

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