JPS53157A - Surface position detector - Google Patents
Surface position detectorInfo
- Publication number
- JPS53157A JPS53157A JP7423176A JP7423176A JPS53157A JP S53157 A JPS53157 A JP S53157A JP 7423176 A JP7423176 A JP 7423176A JP 7423176 A JP7423176 A JP 7423176A JP S53157 A JPS53157 A JP S53157A
- Authority
- JP
- Japan
- Prior art keywords
- position detector
- surface position
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7423176A JPS6041722B2 (ja) | 1976-06-23 | 1976-06-23 | 表面位置検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7423176A JPS6041722B2 (ja) | 1976-06-23 | 1976-06-23 | 表面位置検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53157A true JPS53157A (en) | 1978-01-05 |
JPS6041722B2 JPS6041722B2 (ja) | 1985-09-18 |
Family
ID=13541180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7423176A Expired JPS6041722B2 (ja) | 1976-06-23 | 1976-06-23 | 表面位置検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6041722B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59180407A (ja) * | 1983-03-31 | 1984-10-13 | Koden Kogyo Kk | 光学的位置検出装置 |
JPS61158807U (ja) * | 1986-02-13 | 1986-10-02 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01106811U (ja) * | 1987-12-29 | 1989-07-19 | ||
JPH0429710U (ja) * | 1990-07-06 | 1992-03-10 |
-
1976
- 1976-06-23 JP JP7423176A patent/JPS6041722B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59180407A (ja) * | 1983-03-31 | 1984-10-13 | Koden Kogyo Kk | 光学的位置検出装置 |
JPS61158807U (ja) * | 1986-02-13 | 1986-10-02 |
Also Published As
Publication number | Publication date |
---|---|
JPS6041722B2 (ja) | 1985-09-18 |
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