JPS5314472B2 - - Google Patents

Info

Publication number
JPS5314472B2
JPS5314472B2 JP864275A JP864275A JPS5314472B2 JP S5314472 B2 JPS5314472 B2 JP S5314472B2 JP 864275 A JP864275 A JP 864275A JP 864275 A JP864275 A JP 864275A JP S5314472 B2 JPS5314472 B2 JP S5314472B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP864275A
Other languages
Japanese (ja)
Other versions
JPS5184580A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP864275A priority Critical patent/JPS5184580A/en
Priority to US05/647,448 priority patent/US4123663A/en
Priority to DE2601288A priority patent/DE2601288B2/en
Publication of JPS5184580A publication Critical patent/JPS5184580A/en
Publication of JPS5314472B2 publication Critical patent/JPS5314472B2/ja
Priority to US05/933,846 priority patent/US4192706A/en
Granted legal-status Critical Current

Links

JP864275A 1975-01-22 1975-01-22 GASUETSU CHINGUSOCHI Granted JPS5184580A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP864275A JPS5184580A (en) 1975-01-22 1975-01-22 GASUETSU CHINGUSOCHI
US05/647,448 US4123663A (en) 1975-01-22 1976-01-08 Gas-etching device
DE2601288A DE2601288B2 (en) 1975-01-22 1976-01-15 Gas etching device
US05/933,846 US4192706A (en) 1975-01-22 1978-08-15 Gas-etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP864275A JPS5184580A (en) 1975-01-22 1975-01-22 GASUETSU CHINGUSOCHI

Publications (2)

Publication Number Publication Date
JPS5184580A JPS5184580A (en) 1976-07-23
JPS5314472B2 true JPS5314472B2 (en) 1978-05-17

Family

ID=11698595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP864275A Granted JPS5184580A (en) 1975-01-22 1975-01-22 GASUETSU CHINGUSOCHI

Country Status (1)

Country Link
JP (1) JPS5184580A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244174A (en) * 1975-10-06 1977-04-06 Hitachi Ltd Plasma treatment device
JPS5329065A (en) * 1976-08-31 1978-03-17 Toshiba Corp Vapour phase reaction unit of semiconductor
JPS5384684A (en) * 1976-12-29 1978-07-26 Fujitsu Ltd Plasma etching device
JPS552199U (en) * 1979-07-05 1980-01-09
JPS59145530A (en) * 1983-12-23 1984-08-21 Hitachi Ltd Plasma processing device

Also Published As

Publication number Publication date
JPS5184580A (en) 1976-07-23

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