JPS5312784A - Method and apparatus for transferring substrates in vacuum - Google Patents

Method and apparatus for transferring substrates in vacuum

Info

Publication number
JPS5312784A
JPS5312784A JP8781976A JP8781976A JPS5312784A JP S5312784 A JPS5312784 A JP S5312784A JP 8781976 A JP8781976 A JP 8781976A JP 8781976 A JP8781976 A JP 8781976A JP S5312784 A JPS5312784 A JP S5312784A
Authority
JP
Japan
Prior art keywords
vacuum
substrates
transferring substrates
screw shaft
blades
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8781976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5440393B2 (enrdf_load_stackoverflow
Inventor
Yoshihiro Hirota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP8781976A priority Critical patent/JPS5312784A/ja
Publication of JPS5312784A publication Critical patent/JPS5312784A/ja
Publication of JPS5440393B2 publication Critical patent/JPS5440393B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP8781976A 1976-07-22 1976-07-22 Method and apparatus for transferring substrates in vacuum Granted JPS5312784A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8781976A JPS5312784A (en) 1976-07-22 1976-07-22 Method and apparatus for transferring substrates in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8781976A JPS5312784A (en) 1976-07-22 1976-07-22 Method and apparatus for transferring substrates in vacuum

Publications (2)

Publication Number Publication Date
JPS5312784A true JPS5312784A (en) 1978-02-04
JPS5440393B2 JPS5440393B2 (enrdf_load_stackoverflow) 1979-12-03

Family

ID=13925565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8781976A Granted JPS5312784A (en) 1976-07-22 1976-07-22 Method and apparatus for transferring substrates in vacuum

Country Status (1)

Country Link
JP (1) JPS5312784A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5980466U (ja) * 1982-11-20 1984-05-31 ティーディーケイ株式会社 蒸着装置
JPS60144234U (ja) * 1984-03-05 1985-09-25 株式会社日立国際電気 シリコン縦形エピタキシヤル成長装置
US5496861A (en) * 1990-11-19 1996-03-05 National Starch And Chemical Investment Holding Corporation Cosmetics containing enzymatically debranched starch

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5980466U (ja) * 1982-11-20 1984-05-31 ティーディーケイ株式会社 蒸着装置
JPS60144234U (ja) * 1984-03-05 1985-09-25 株式会社日立国際電気 シリコン縦形エピタキシヤル成長装置
US5496861A (en) * 1990-11-19 1996-03-05 National Starch And Chemical Investment Holding Corporation Cosmetics containing enzymatically debranched starch

Also Published As

Publication number Publication date
JPS5440393B2 (enrdf_load_stackoverflow) 1979-12-03

Similar Documents

Publication Publication Date Title
YU116679A (en) Vacuum furnace with devices for cooling by gas
ES8101851A1 (es) Perfeccionamientos en dispositivos para cortar bloques de barquillos
JPS5312784A (en) Method and apparatus for transferring substrates in vacuum
JPS5437944A (en) Apparatuses operation controller
JPS5371386A (en) Apparatus for disposing chips produced in drill processing and the like
JPS5214370A (en) Baking device
JPS51151961A (en) Method of taking o ut thin plates
JPS5299909A (en) Process and apparatus for annealing continuously strips
JPS53133521A (en) Carrying device for hot fine grains
JPS52124683A (en) Device for scavengig steps of man conveyor
JPS51122269A (en) Speed control apparatus for transport device
JPS52104475A (en) Vacuum surface treating apparatus
JPS5213205A (en) Snow-removing apparatus
JPS5235348A (en) High frequency heating device
JPS51115846A (en) Orientation processing method and device for liquid crystal panel
JPS5264032A (en) High frequency heating system
JPS53131763A (en) Molecular beam epitaxial growth apparatus
JPS5524304A (en) Magazine device of circulation type
JPS5227069A (en) Gas absorption apparatus
JPS56150821A (en) Boat for heat treatment of semiconductor
JPS5380041A (en) Cooling apparatus for air cooling
JPS53140769A (en) Conveying apparatus
JPS51117981A (en) Optical multi-layer film depositing apparatus
JPS51113574A (en) Semi-conductor unit manufacturing method
JPS5391670A (en) Transfer method for semiconductor wafer