JPS5310640A - Equipment for thin film forming - Google Patents

Equipment for thin film forming

Info

Publication number
JPS5310640A
JPS5310640A JP8509576A JP8509576A JPS5310640A JP S5310640 A JPS5310640 A JP S5310640A JP 8509576 A JP8509576 A JP 8509576A JP 8509576 A JP8509576 A JP 8509576A JP S5310640 A JPS5310640 A JP S5310640A
Authority
JP
Japan
Prior art keywords
equipment
thin film
film forming
concentration
equiiped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8509576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5741986B2 (enrdf_load_stackoverflow
Inventor
Hideo Matsuzaki
Shizuo Ishitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8509576A priority Critical patent/JPS5310640A/ja
Publication of JPS5310640A publication Critical patent/JPS5310640A/ja
Publication of JPS5741986B2 publication Critical patent/JPS5741986B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP8509576A 1976-07-19 1976-07-19 Equipment for thin film forming Granted JPS5310640A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8509576A JPS5310640A (en) 1976-07-19 1976-07-19 Equipment for thin film forming

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8509576A JPS5310640A (en) 1976-07-19 1976-07-19 Equipment for thin film forming

Publications (2)

Publication Number Publication Date
JPS5310640A true JPS5310640A (en) 1978-01-31
JPS5741986B2 JPS5741986B2 (enrdf_load_stackoverflow) 1982-09-06

Family

ID=13849036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8509576A Granted JPS5310640A (en) 1976-07-19 1976-07-19 Equipment for thin film forming

Country Status (1)

Country Link
JP (1) JPS5310640A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS575047A (en) * 1980-06-13 1982-01-11 Ricoh Co Ltd Coating method by dipping
JP2016532907A (ja) * 2013-09-12 2016-10-20 エルジー・ケム・リミテッド 偏光フィルムの製造装置
KR20160129754A (ko) * 2015-04-30 2016-11-09 우에노 세이야쿠 가부시키 가이샤 4-히드록시-벤조산 장쇄 에스테르의 제조 방법 및 정제 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4842702U (enrdf_load_stackoverflow) * 1971-09-21 1973-06-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4842702U (enrdf_load_stackoverflow) * 1971-09-21 1973-06-01

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS575047A (en) * 1980-06-13 1982-01-11 Ricoh Co Ltd Coating method by dipping
JP2016532907A (ja) * 2013-09-12 2016-10-20 エルジー・ケム・リミテッド 偏光フィルムの製造装置
KR20160129754A (ko) * 2015-04-30 2016-11-09 우에노 세이야쿠 가부시키 가이샤 4-히드록시-벤조산 장쇄 에스테르의 제조 방법 및 정제 방법

Also Published As

Publication number Publication date
JPS5741986B2 (enrdf_load_stackoverflow) 1982-09-06

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