JPS5310111A - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
JPS5310111A
JPS5310111A JP8483776A JP8483776A JPS5310111A JP S5310111 A JPS5310111 A JP S5310111A JP 8483776 A JP8483776 A JP 8483776A JP 8483776 A JP8483776 A JP 8483776A JP S5310111 A JPS5310111 A JP S5310111A
Authority
JP
Japan
Prior art keywords
vacuum pump
multipackter
adoption
enlarging
drop
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8483776A
Other languages
Japanese (ja)
Inventor
Shoichi Ono
Tadashi Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8483776A priority Critical patent/JPS5310111A/en
Publication of JPS5310111A publication Critical patent/JPS5310111A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE: Adoption of multipackter effect into its behavior increases extremely electron capacity existing in unit volume in ionized space in high vacuum condition in order to enlarging exhaust velocity and to prevent the drop thereof.
COPYRIGHT: (C)1978,JPO&Japio
JP8483776A 1976-07-15 1976-07-15 Vacuum pump Pending JPS5310111A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8483776A JPS5310111A (en) 1976-07-15 1976-07-15 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8483776A JPS5310111A (en) 1976-07-15 1976-07-15 Vacuum pump

Publications (1)

Publication Number Publication Date
JPS5310111A true JPS5310111A (en) 1978-01-30

Family

ID=13841893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8483776A Pending JPS5310111A (en) 1976-07-15 1976-07-15 Vacuum pump

Country Status (1)

Country Link
JP (1) JPS5310111A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6033753U (en) * 1984-07-05 1985-03-07 東北大学長 Ion pump for ultra-high vacuum

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6033753U (en) * 1984-07-05 1985-03-07 東北大学長 Ion pump for ultra-high vacuum

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