JPS529971B2 - - Google Patents

Info

Publication number
JPS529971B2
JPS529971B2 JP48073699A JP7369973A JPS529971B2 JP S529971 B2 JPS529971 B2 JP S529971B2 JP 48073699 A JP48073699 A JP 48073699A JP 7369973 A JP7369973 A JP 7369973A JP S529971 B2 JPS529971 B2 JP S529971B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48073699A
Other languages
Japanese (ja)
Other versions
JPS5023767A (en&quot
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48073699A priority Critical patent/JPS529971B2/ja
Priority to US484339A priority patent/US3895254A/en
Publication of JPS5023767A publication Critical patent/JPS5023767A/ja
Publication of JPS529971B2 publication Critical patent/JPS529971B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP48073699A 1973-07-02 1973-07-02 Expired JPS529971B2 (en&quot)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP48073699A JPS529971B2 (en&quot) 1973-07-02 1973-07-02
US484339A US3895254A (en) 1973-07-02 1974-06-28 Charged particle accelerator with integral transformer and shielding means

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48073699A JPS529971B2 (en&quot) 1973-07-02 1973-07-02

Publications (2)

Publication Number Publication Date
JPS5023767A JPS5023767A (en&quot) 1975-03-14
JPS529971B2 true JPS529971B2 (en&quot) 1977-03-19

Family

ID=13525708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48073699A Expired JPS529971B2 (en&quot) 1973-07-02 1973-07-02

Country Status (2)

Country Link
US (1) US3895254A (en&quot)
JP (1) JPS529971B2 (en&quot)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1454985A (en) * 1975-07-17 1976-11-10 Inst Yadernoi Fiziki Sibirskog Charged particle accelerators
JPS5268918A (en) * 1975-12-05 1977-06-08 Hitachi Ltd Insulated transformer
DE3333686A1 (de) * 1983-09-17 1985-04-04 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlkanone zum erwaermen von materialien, insbesondere zum schweissen
DE3930200A1 (de) * 1989-09-09 1991-03-14 Ptr Praezisionstech Gmbh Elektronenstrahlerzeuger, insbesondere fuer eine elektronenstrahlkanone
EP0473216B1 (en) * 1990-08-10 1997-03-19 Koninklijke Philips Electronics N.V. Charged particle beam device
EP2419909B1 (de) * 2009-04-14 2013-01-23 Siemens AG Strahlkopf
JP5959326B2 (ja) * 2012-06-11 2016-08-02 株式会社日立ハイテクノロジーズ 荷電粒子ビーム発生装置、荷電粒子線装置、高電圧発生装置、および高電位装置
CN109275255B (zh) * 2018-10-29 2024-04-26 同方威视技术股份有限公司 用于电子加速器的灯丝电源和电子加速器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1815131A (en) * 1921-10-14 1931-07-21 Rca Corp Means for heating filaments
US3119931A (en) * 1960-06-28 1964-01-28 Philips Corp Circuit means for coupling an x-ray device to a control supply apparatus
DE1225775B (de) * 1963-03-23 1966-09-29 United Aircraft Corp Verfahren und Einrichtung zur Bearbeitung eines Werkstueckes mittels eines Ladungstraegerstrahles
DE1290761B (de) * 1963-11-22 1969-03-13 Daimler Benz Ag Kolbenmulde fuer Kolben von Rotationskolben-Brennkraftmaschinen mit Schlupfeingriff
JPS5247660B2 (en&quot) * 1971-11-17 1977-12-03

Also Published As

Publication number Publication date
US3895254A (en) 1975-07-15
JPS5023767A (en&quot) 1975-03-14

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