JPS5295181A - Heating table - Google Patents

Heating table

Info

Publication number
JPS5295181A
JPS5295181A JP1146076A JP1146076A JPS5295181A JP S5295181 A JPS5295181 A JP S5295181A JP 1146076 A JP1146076 A JP 1146076A JP 1146076 A JP1146076 A JP 1146076A JP S5295181 A JPS5295181 A JP S5295181A
Authority
JP
Japan
Prior art keywords
heating table
carried objects
overheat
troubles
annealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1146076A
Other languages
Japanese (ja)
Other versions
JPS6011468B2 (en
Inventor
Minoru Sakurai
Soichiro Nakamura
Masahiro Horii
Makoto Yoshida
Haruo Amada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1146076A priority Critical patent/JPS6011468B2/en
Publication of JPS5295181A publication Critical patent/JPS5295181A/en
Publication of JPS6011468B2 publication Critical patent/JPS6011468B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To protect the carried objects from annealing and oxidizing due to the overheat by the heating table to be away from the carried objects in case of the troubles and the adjustment of the assembling and working device.
COPYRIGHT: (C)1977,JPO&Japio
JP1146076A 1976-02-06 1976-02-06 heating table Expired JPS6011468B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1146076A JPS6011468B2 (en) 1976-02-06 1976-02-06 heating table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1146076A JPS6011468B2 (en) 1976-02-06 1976-02-06 heating table

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP59070884A Division JPS60149140A (en) 1984-04-11 1984-04-11 Bonding equipment for semiconductor device assembly

Publications (2)

Publication Number Publication Date
JPS5295181A true JPS5295181A (en) 1977-08-10
JPS6011468B2 JPS6011468B2 (en) 1985-03-26

Family

ID=11778697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1146076A Expired JPS6011468B2 (en) 1976-02-06 1976-02-06 heating table

Country Status (1)

Country Link
JP (1) JPS6011468B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60149140A (en) * 1984-04-11 1985-08-06 Hitachi Ltd Bonding equipment for semiconductor device assembly

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61234093A (en) * 1985-04-10 1986-10-18 松下電器産業株式会社 Wiring substrate
JPH01145173U (en) * 1988-03-29 1989-10-05
JPH0416584U (en) * 1990-05-29 1992-02-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60149140A (en) * 1984-04-11 1985-08-06 Hitachi Ltd Bonding equipment for semiconductor device assembly

Also Published As

Publication number Publication date
JPS6011468B2 (en) 1985-03-26

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