JPS5288590A - Apparatus for manufacturing single crystal - Google Patents

Apparatus for manufacturing single crystal

Info

Publication number
JPS5288590A
JPS5288590A JP487576A JP487576A JPS5288590A JP S5288590 A JPS5288590 A JP S5288590A JP 487576 A JP487576 A JP 487576A JP 487576 A JP487576 A JP 487576A JP S5288590 A JPS5288590 A JP S5288590A
Authority
JP
Japan
Prior art keywords
single crystal
manufacturing single
crystal
small pore
equipping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP487576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5328387B2 (enrdf_load_stackoverflow
Inventor
Shinichiro Takasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP487576A priority Critical patent/JPS5288590A/ja
Publication of JPS5288590A publication Critical patent/JPS5288590A/ja
Publication of JPS5328387B2 publication Critical patent/JPS5328387B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP487576A 1976-01-21 1976-01-21 Apparatus for manufacturing single crystal Granted JPS5288590A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP487576A JPS5288590A (en) 1976-01-21 1976-01-21 Apparatus for manufacturing single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP487576A JPS5288590A (en) 1976-01-21 1976-01-21 Apparatus for manufacturing single crystal

Publications (2)

Publication Number Publication Date
JPS5288590A true JPS5288590A (en) 1977-07-25
JPS5328387B2 JPS5328387B2 (enrdf_load_stackoverflow) 1978-08-14

Family

ID=11595834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP487576A Granted JPS5288590A (en) 1976-01-21 1976-01-21 Apparatus for manufacturing single crystal

Country Status (1)

Country Link
JP (1) JPS5288590A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426284A (en) * 1977-07-30 1979-02-27 Cho Lsi Gijutsu Kenkyu Kumiai Crystal growth apparatus
CN104120487A (zh) * 2013-08-23 2014-10-29 江苏中电振华晶体技术有限公司 板状蓝宝石晶体生长方法及生长设备

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426284A (en) * 1977-07-30 1979-02-27 Cho Lsi Gijutsu Kenkyu Kumiai Crystal growth apparatus
CN104120487A (zh) * 2013-08-23 2014-10-29 江苏中电振华晶体技术有限公司 板状蓝宝石晶体生长方法及生长设备

Also Published As

Publication number Publication date
JPS5328387B2 (enrdf_load_stackoverflow) 1978-08-14

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