JPS5272174A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5272174A
JPS5272174A JP14884575A JP14884575A JPS5272174A JP S5272174 A JPS5272174 A JP S5272174A JP 14884575 A JP14884575 A JP 14884575A JP 14884575 A JP14884575 A JP 14884575A JP S5272174 A JPS5272174 A JP S5272174A
Authority
JP
Japan
Prior art keywords
semiconductor device
production
semiconductor substrate
insulating film
conductivity type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14884575A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5756767B2 (enrdf_load_stackoverflow
Inventor
Tsutomu Yoshihara
Masahiko Yasuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14884575A priority Critical patent/JPS5272174A/ja
Publication of JPS5272174A publication Critical patent/JPS5272174A/ja
Publication of JPS5756767B2 publication Critical patent/JPS5756767B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)
JP14884575A 1975-12-12 1975-12-12 Production of semiconductor device Granted JPS5272174A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14884575A JPS5272174A (en) 1975-12-12 1975-12-12 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14884575A JPS5272174A (en) 1975-12-12 1975-12-12 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5272174A true JPS5272174A (en) 1977-06-16
JPS5756767B2 JPS5756767B2 (enrdf_load_stackoverflow) 1982-12-01

Family

ID=15462012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14884575A Granted JPS5272174A (en) 1975-12-12 1975-12-12 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5272174A (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4861079A (enrdf_load_stackoverflow) * 1971-12-02 1973-08-27
JPS509630A (enrdf_load_stackoverflow) * 1973-04-13 1975-01-31
JPS5099686A (enrdf_load_stackoverflow) * 1973-12-29 1975-08-07

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4861079A (enrdf_load_stackoverflow) * 1971-12-02 1973-08-27
JPS509630A (enrdf_load_stackoverflow) * 1973-04-13 1975-01-31
JPS5099686A (enrdf_load_stackoverflow) * 1973-12-29 1975-08-07

Also Published As

Publication number Publication date
JPS5756767B2 (enrdf_load_stackoverflow) 1982-12-01

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