JPS5258897A - Production of dielectric thin film - Google Patents

Production of dielectric thin film

Info

Publication number
JPS5258897A
JPS5258897A JP50135776A JP13577675A JPS5258897A JP S5258897 A JPS5258897 A JP S5258897A JP 50135776 A JP50135776 A JP 50135776A JP 13577675 A JP13577675 A JP 13577675A JP S5258897 A JPS5258897 A JP S5258897A
Authority
JP
Japan
Prior art keywords
dielectric thin
thin film
production
sputtering
uniform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50135776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5619924B2 (enrdf_load_stackoverflow
Inventor
Tsuneo Mitsuyu
Kiyotaka Wasa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50135776A priority Critical patent/JPS5258897A/ja
Publication of JPS5258897A publication Critical patent/JPS5258897A/ja
Publication of JPS5619924B2 publication Critical patent/JPS5619924B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Inorganic Insulating Materials (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP50135776A 1975-11-11 1975-11-11 Production of dielectric thin film Granted JPS5258897A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50135776A JPS5258897A (en) 1975-11-11 1975-11-11 Production of dielectric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50135776A JPS5258897A (en) 1975-11-11 1975-11-11 Production of dielectric thin film

Publications (2)

Publication Number Publication Date
JPS5258897A true JPS5258897A (en) 1977-05-14
JPS5619924B2 JPS5619924B2 (enrdf_load_stackoverflow) 1981-05-11

Family

ID=15159578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50135776A Granted JPS5258897A (en) 1975-11-11 1975-11-11 Production of dielectric thin film

Country Status (1)

Country Link
JP (1) JPS5258897A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4792463A (en) * 1985-09-17 1988-12-20 Masaru Okada Method of producing ferroelectric thin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4792463A (en) * 1985-09-17 1988-12-20 Masaru Okada Method of producing ferroelectric thin film

Also Published As

Publication number Publication date
JPS5619924B2 (enrdf_load_stackoverflow) 1981-05-11

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