JPS5243692B2 - - Google Patents

Info

Publication number
JPS5243692B2
JPS5243692B2 JP48033605A JP3360573A JPS5243692B2 JP S5243692 B2 JPS5243692 B2 JP S5243692B2 JP 48033605 A JP48033605 A JP 48033605A JP 3360573 A JP3360573 A JP 3360573A JP S5243692 B2 JPS5243692 B2 JP S5243692B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48033605A
Other languages
Japanese (ja)
Other versions
JPS49122756A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48033605A priority Critical patent/JPS5243692B2/ja
Publication of JPS49122756A publication Critical patent/JPS49122756A/ja
Publication of JPS5243692B2 publication Critical patent/JPS5243692B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP48033605A 1973-03-26 1973-03-26 Expired JPS5243692B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48033605A JPS5243692B2 (enrdf_load_stackoverflow) 1973-03-26 1973-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48033605A JPS5243692B2 (enrdf_load_stackoverflow) 1973-03-26 1973-03-26

Publications (2)

Publication Number Publication Date
JPS49122756A JPS49122756A (enrdf_load_stackoverflow) 1974-11-25
JPS5243692B2 true JPS5243692B2 (enrdf_load_stackoverflow) 1977-11-01

Family

ID=12391092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48033605A Expired JPS5243692B2 (enrdf_load_stackoverflow) 1973-03-26 1973-03-26

Country Status (1)

Country Link
JP (1) JPS5243692B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5328556Y2 (enrdf_load_stackoverflow) * 1974-12-06 1978-07-18
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method
JPS5381569U (enrdf_load_stackoverflow) * 1976-12-09 1978-07-06
US4472824A (en) * 1982-08-04 1984-09-18 The Perkin-Elmer Corporation Apparatus for effecting alignment and spacing control of a mask and wafer for use in X-ray lithography
JPH0722107B2 (ja) * 1986-02-10 1995-03-08 株式会社ニコン 露光装置
JPH0628222B2 (ja) * 1986-05-28 1994-04-13 株式会社日立製作所 プロキシミテイ方式の露光装置

Also Published As

Publication number Publication date
JPS49122756A (enrdf_load_stackoverflow) 1974-11-25

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