JPS5242592B2 - - Google Patents

Info

Publication number
JPS5242592B2
JPS5242592B2 JP2873973A JP2873973A JPS5242592B2 JP S5242592 B2 JPS5242592 B2 JP S5242592B2 JP 2873973 A JP2873973 A JP 2873973A JP 2873973 A JP2873973 A JP 2873973A JP S5242592 B2 JPS5242592 B2 JP S5242592B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2873973A
Other languages
Japanese (ja)
Other versions
JPS49118373A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2873973A priority Critical patent/JPS5242592B2/ja
Publication of JPS49118373A publication Critical patent/JPS49118373A/ja
Publication of JPS5242592B2 publication Critical patent/JPS5242592B2/ja
Expired legal-status Critical Current

Links

JP2873973A 1973-03-12 1973-03-12 Expired JPS5242592B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2873973A JPS5242592B2 (en) 1973-03-12 1973-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2873973A JPS5242592B2 (en) 1973-03-12 1973-03-12

Publications (2)

Publication Number Publication Date
JPS49118373A JPS49118373A (en) 1974-11-12
JPS5242592B2 true JPS5242592B2 (en) 1977-10-25

Family

ID=12256781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2873973A Expired JPS5242592B2 (en) 1973-03-12 1973-03-12

Country Status (1)

Country Link
JP (1) JPS5242592B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51118974A (en) * 1975-04-11 1976-10-19 Matsushita Electric Ind Co Ltd Manufacturing method of semiconductor device
JPS5373086A (en) * 1976-12-11 1978-06-29 Fujitsu Ltd Formation of multilayer wiring structure
US4249968A (en) * 1978-12-29 1981-02-10 International Business Machines Corporation Method of manufacturing a metal-insulator-semiconductor utilizing a multiple stage deposition of polycrystalline layers

Also Published As

Publication number Publication date
JPS49118373A (en) 1974-11-12

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