JPS523780B2 - - Google Patents

Info

Publication number
JPS523780B2
JPS523780B2 JP8993872A JP8993872A JPS523780B2 JP S523780 B2 JPS523780 B2 JP S523780B2 JP 8993872 A JP8993872 A JP 8993872A JP 8993872 A JP8993872 A JP 8993872A JP S523780 B2 JPS523780 B2 JP S523780B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8993872A
Other languages
Japanese (ja)
Other versions
JPS4946679A (US20020167097A1-20021114-C00005.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8993872A priority Critical patent/JPS523780B2/ja
Publication of JPS4946679A publication Critical patent/JPS4946679A/ja
Publication of JPS523780B2 publication Critical patent/JPS523780B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP8993872A 1972-09-07 1972-09-07 Expired JPS523780B2 (US20020167097A1-20021114-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8993872A JPS523780B2 (US20020167097A1-20021114-C00005.png) 1972-09-07 1972-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8993872A JPS523780B2 (US20020167097A1-20021114-C00005.png) 1972-09-07 1972-09-07

Publications (2)

Publication Number Publication Date
JPS4946679A JPS4946679A (US20020167097A1-20021114-C00005.png) 1974-05-04
JPS523780B2 true JPS523780B2 (US20020167097A1-20021114-C00005.png) 1977-01-29

Family

ID=13984628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8993872A Expired JPS523780B2 (US20020167097A1-20021114-C00005.png) 1972-09-07 1972-09-07

Country Status (1)

Country Link
JP (1) JPS523780B2 (US20020167097A1-20021114-C00005.png)

Also Published As

Publication number Publication date
JPS4946679A (US20020167097A1-20021114-C00005.png) 1974-05-04

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