JPS523618B2 - - Google Patents

Info

Publication number
JPS523618B2
JPS523618B2 JP47101789A JP10178972A JPS523618B2 JP S523618 B2 JPS523618 B2 JP S523618B2 JP 47101789 A JP47101789 A JP 47101789A JP 10178972 A JP10178972 A JP 10178972A JP S523618 B2 JPS523618 B2 JP S523618B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47101789A
Other languages
Japanese (ja)
Other versions
JPS4959085A (US20080094685A1-20080424-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47101789A priority Critical patent/JPS523618B2/ja
Priority to US405536A priority patent/US3900612A/en
Publication of JPS4959085A publication Critical patent/JPS4959085A/ja
Publication of JPS523618B2 publication Critical patent/JPS523618B2/ja
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52Controlling or regulating the coating process
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49826Assembling or joining
    • Y10T29/49861Sizing mating parts during final positional association

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Fuel-Injection Apparatus (AREA)
JP47101789A 1972-10-11 1972-10-11 Expired JPS523618B2 (US20080094685A1-20080424-C00004.png)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP47101789A JPS523618B2 (US20080094685A1-20080424-C00004.png) 1972-10-11 1972-10-11
US405536A US3900612A (en) 1972-10-11 1973-10-11 Method for chemical vapor deposition of fitted surfaces in coupled article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47101789A JPS523618B2 (US20080094685A1-20080424-C00004.png) 1972-10-11 1972-10-11

Publications (2)

Publication Number Publication Date
JPS4959085A JPS4959085A (US20080094685A1-20080424-C00004.png) 1974-06-07
JPS523618B2 true JPS523618B2 (US20080094685A1-20080424-C00004.png) 1977-01-28

Family

ID=14309924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47101789A Expired JPS523618B2 (US20080094685A1-20080424-C00004.png) 1972-10-11 1972-10-11

Country Status (2)

Country Link
US (1) US3900612A (US20080094685A1-20080424-C00004.png)
JP (1) JPS523618B2 (US20080094685A1-20080424-C00004.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1182433B (it) * 1985-02-12 1987-10-05 Gevipi Ag Organi di tenuta in materiale duro aventi basso coefficiente di attrito
US4935313A (en) * 1985-02-12 1990-06-19 Masco Corporation Of Indiana Process of manufacturing seal members having a low friction coefficient

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2130879A (en) * 1936-04-08 1938-09-20 Gen Electric Method of making a vacuum-tight joint between solid bodies
US2880118A (en) * 1956-04-19 1959-03-31 James E Taylor Vibratory coating method and apparatus
US3637320A (en) * 1968-12-31 1972-01-25 Texas Instruments Inc Coating for assembly of parts

Also Published As

Publication number Publication date
JPS4959085A (US20080094685A1-20080424-C00004.png) 1974-06-07
US3900612A (en) 1975-08-19

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