JPS5233847A - Method of etching gallium phosphate and etching liquid therefor - Google Patents

Method of etching gallium phosphate and etching liquid therefor

Info

Publication number
JPS5233847A
JPS5233847A JP50110218A JP11021875A JPS5233847A JP S5233847 A JPS5233847 A JP S5233847A JP 50110218 A JP50110218 A JP 50110218A JP 11021875 A JP11021875 A JP 11021875A JP S5233847 A JPS5233847 A JP S5233847A
Authority
JP
Japan
Prior art keywords
etching
gallium phosphate
liquid therefor
etching liquid
therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50110218A
Other languages
English (en)
Japanese (ja)
Other versions
JPS559462B2 (enrdf_load_stackoverflow
Inventor
Masaaki Ooshima
Kouzou Ariga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50110218A priority Critical patent/JPS5233847A/ja
Publication of JPS5233847A publication Critical patent/JPS5233847A/ja
Publication of JPS559462B2 publication Critical patent/JPS559462B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP50110218A 1975-09-10 1975-09-10 Method of etching gallium phosphate and etching liquid therefor Granted JPS5233847A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50110218A JPS5233847A (en) 1975-09-10 1975-09-10 Method of etching gallium phosphate and etching liquid therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50110218A JPS5233847A (en) 1975-09-10 1975-09-10 Method of etching gallium phosphate and etching liquid therefor

Publications (2)

Publication Number Publication Date
JPS5233847A true JPS5233847A (en) 1977-03-15
JPS559462B2 JPS559462B2 (enrdf_load_stackoverflow) 1980-03-10

Family

ID=14530058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50110218A Granted JPS5233847A (en) 1975-09-10 1975-09-10 Method of etching gallium phosphate and etching liquid therefor

Country Status (1)

Country Link
JP (1) JPS5233847A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658237A (en) * 1979-10-17 1981-05-21 Semiconductor Res Found Light control type etching method
JPS5658238A (en) * 1979-10-17 1981-05-21 Semiconductor Res Found Etching liquid

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658237A (en) * 1979-10-17 1981-05-21 Semiconductor Res Found Light control type etching method
JPS5658238A (en) * 1979-10-17 1981-05-21 Semiconductor Res Found Etching liquid

Also Published As

Publication number Publication date
JPS559462B2 (enrdf_load_stackoverflow) 1980-03-10

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