JPS5226237B2 - - Google Patents
Info
- Publication number
- JPS5226237B2 JPS5226237B2 JP2496773A JP2496773A JPS5226237B2 JP S5226237 B2 JPS5226237 B2 JP S5226237B2 JP 2496773 A JP2496773 A JP 2496773A JP 2496773 A JP2496773 A JP 2496773A JP S5226237 B2 JPS5226237 B2 JP S5226237B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2496773A JPS5226237B2 (ko) | 1973-03-02 | 1973-03-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2496773A JPS5226237B2 (ko) | 1973-03-02 | 1973-03-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS49113779A JPS49113779A (ko) | 1974-10-30 |
JPS5226237B2 true JPS5226237B2 (ko) | 1977-07-13 |
Family
ID=12152729
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2496773A Expired JPS5226237B2 (ko) | 1973-03-02 | 1973-03-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5226237B2 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102086574B1 (ko) | 2018-04-03 | 2020-03-09 | 전남대학교산학협력단 | 분말 입자를 코팅할 수 있는 증착장치 및 분말 입자의 코팅 방법 |
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1973
- 1973-03-02 JP JP2496773A patent/JPS5226237B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS49113779A (ko) | 1974-10-30 |