JPS5225680A - Semiconductor strain gauge type pressure sensor - Google Patents

Semiconductor strain gauge type pressure sensor

Info

Publication number
JPS5225680A
JPS5225680A JP10124975A JP10124975A JPS5225680A JP S5225680 A JPS5225680 A JP S5225680A JP 10124975 A JP10124975 A JP 10124975A JP 10124975 A JP10124975 A JP 10124975A JP S5225680 A JPS5225680 A JP S5225680A
Authority
JP
Japan
Prior art keywords
pressure sensor
strain gauge
type pressure
semiconductor strain
gauge type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10124975A
Inventor
Yukio Hosho
Hitoshi Minorikawa
Tadao Suzuki
Kazunori Uruno
Original Assignee
Automob Antipollut & Saf Res Center
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Automob Antipollut & Saf Res Center filed Critical Automob Antipollut & Saf Res Center
Priority to JP10124975A priority Critical patent/JPS5225680A/en
Publication of JPS5225680A publication Critical patent/JPS5225680A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To prevent exudation of tip coating resins and reduce the number of parts and working steps by fixing a semiconductor and lead frame to one side of glass plate with non-polished surfaces and providing a groove surrounding the hole of the glass plate of the face of the insulator in contact with the other side of the glass plate.
COPYRIGHT: (C)1977,JPO&Japio
JP10124975A 1975-08-22 1975-08-22 Semiconductor strain gauge type pressure sensor Pending JPS5225680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10124975A JPS5225680A (en) 1975-08-22 1975-08-22 Semiconductor strain gauge type pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10124975A JPS5225680A (en) 1975-08-22 1975-08-22 Semiconductor strain gauge type pressure sensor

Publications (1)

Publication Number Publication Date
JPS5225680A true JPS5225680A (en) 1977-02-25

Family

ID=14295622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10124975A Pending JPS5225680A (en) 1975-08-22 1975-08-22 Semiconductor strain gauge type pressure sensor

Country Status (1)

Country Link
JP (1) JPS5225680A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4655088A (en) * 1985-10-07 1987-04-07 Motorola, Inc. Unibody pressure transducer package

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4655088A (en) * 1985-10-07 1987-04-07 Motorola, Inc. Unibody pressure transducer package

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