JPS5225081B2 - - Google Patents

Info

Publication number
JPS5225081B2
JPS5225081B2 JP47073937A JP7393772A JPS5225081B2 JP S5225081 B2 JPS5225081 B2 JP S5225081B2 JP 47073937 A JP47073937 A JP 47073937A JP 7393772 A JP7393772 A JP 7393772A JP S5225081 B2 JPS5225081 B2 JP S5225081B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47073937A
Other languages
Japanese (ja)
Other versions
JPS4933610A (US20080094685A1-20080424-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47073937A priority Critical patent/JPS5225081B2/ja
Publication of JPS4933610A publication Critical patent/JPS4933610A/ja
Publication of JPS5225081B2 publication Critical patent/JPS5225081B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
JP47073937A 1972-07-24 1972-07-24 Expired JPS5225081B2 (US20080094685A1-20080424-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47073937A JPS5225081B2 (US20080094685A1-20080424-C00004.png) 1972-07-24 1972-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47073937A JPS5225081B2 (US20080094685A1-20080424-C00004.png) 1972-07-24 1972-07-24

Publications (2)

Publication Number Publication Date
JPS4933610A JPS4933610A (US20080094685A1-20080424-C00004.png) 1974-03-28
JPS5225081B2 true JPS5225081B2 (US20080094685A1-20080424-C00004.png) 1977-07-05

Family

ID=13532516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47073937A Expired JPS5225081B2 (US20080094685A1-20080424-C00004.png) 1972-07-24 1972-07-24

Country Status (1)

Country Link
JP (1) JPS5225081B2 (US20080094685A1-20080424-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160118968A (ko) * 2015-04-03 2016-10-12 램 리써치 코포레이션 Ald 및 ale에 의해 컨포멀한 막들의 증착

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285056U (US20080094685A1-20080424-C00004.png) * 1975-12-20 1977-06-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160118968A (ko) * 2015-04-03 2016-10-12 램 리써치 코포레이션 Ald 및 ale에 의해 컨포멀한 막들의 증착

Also Published As

Publication number Publication date
JPS4933610A (US20080094685A1-20080424-C00004.png) 1974-03-28

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