JPS5221232A - Ionnetching method - Google Patents

Ionnetching method

Info

Publication number
JPS5221232A
JPS5221232A JP9872775A JP9872775A JPS5221232A JP S5221232 A JPS5221232 A JP S5221232A JP 9872775 A JP9872775 A JP 9872775A JP 9872775 A JP9872775 A JP 9872775A JP S5221232 A JPS5221232 A JP S5221232A
Authority
JP
Japan
Prior art keywords
ionnetching
ionnetching method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9872775A
Other languages
English (en)
Other versions
JPS5812339B2 (ja
Inventor
Tsutomu Tsukada
Naokichi Hosokawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDEN VARIAN KK
Original Assignee
NICHIDEN VARIAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDEN VARIAN KK filed Critical NICHIDEN VARIAN KK
Priority to JP9872775A priority Critical patent/JPS5812339B2/ja
Publication of JPS5221232A publication Critical patent/JPS5221232A/ja
Publication of JPS5812339B2 publication Critical patent/JPS5812339B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP9872775A 1975-08-13 1975-08-13 イオンエツチングホウホウ Expired JPS5812339B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9872775A JPS5812339B2 (ja) 1975-08-13 1975-08-13 イオンエツチングホウホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9872775A JPS5812339B2 (ja) 1975-08-13 1975-08-13 イオンエツチングホウホウ

Publications (2)

Publication Number Publication Date
JPS5221232A true JPS5221232A (en) 1977-02-17
JPS5812339B2 JPS5812339B2 (ja) 1983-03-08

Family

ID=14227545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9872775A Expired JPS5812339B2 (ja) 1975-08-13 1975-08-13 イオンエツチングホウホウ

Country Status (1)

Country Link
JP (1) JPS5812339B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5687665A (en) * 1979-12-20 1981-07-16 Toshiba Corp Ion etching method
JPS63116242U (ja) * 1986-10-06 1988-07-27

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62141345U (ja) * 1986-02-28 1987-09-07
JPH0327628U (ja) * 1989-07-20 1991-03-20

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5687665A (en) * 1979-12-20 1981-07-16 Toshiba Corp Ion etching method
JPS63116242U (ja) * 1986-10-06 1988-07-27

Also Published As

Publication number Publication date
JPS5812339B2 (ja) 1983-03-08

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