JPS52170851U - - Google Patents

Info

Publication number
JPS52170851U
JPS52170851U JP7893576U JP7893576U JPS52170851U JP S52170851 U JPS52170851 U JP S52170851U JP 7893576 U JP7893576 U JP 7893576U JP 7893576 U JP7893576 U JP 7893576U JP S52170851 U JPS52170851 U JP S52170851U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7893576U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7893576U priority Critical patent/JPS52170851U/ja
Publication of JPS52170851U publication Critical patent/JPS52170851U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7893576U 1976-06-18 1976-06-18 Pending JPS52170851U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7893576U JPS52170851U (US20030199744A1-20031023-C00003.png) 1976-06-18 1976-06-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7893576U JPS52170851U (US20030199744A1-20031023-C00003.png) 1976-06-18 1976-06-18

Publications (1)

Publication Number Publication Date
JPS52170851U true JPS52170851U (US20030199744A1-20031023-C00003.png) 1977-12-26

Family

ID=28556282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7893576U Pending JPS52170851U (US20030199744A1-20031023-C00003.png) 1976-06-18 1976-06-18

Country Status (1)

Country Link
JP (1) JPS52170851U (US20030199744A1-20031023-C00003.png)

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