JPS52167453U - - Google Patents

Info

Publication number
JPS52167453U
JPS52167453U JP7632276U JP7632276U JPS52167453U JP S52167453 U JPS52167453 U JP S52167453U JP 7632276 U JP7632276 U JP 7632276U JP 7632276 U JP7632276 U JP 7632276U JP S52167453 U JPS52167453 U JP S52167453U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7632276U
Other languages
Japanese (ja)
Other versions
JPS5618632Y2 (US20110009641A1-20110113-C00160.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7632276U priority Critical patent/JPS5618632Y2/ja
Publication of JPS52167453U publication Critical patent/JPS52167453U/ja
Application granted granted Critical
Publication of JPS5618632Y2 publication Critical patent/JPS5618632Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7632276U 1976-06-14 1976-06-14 Expired JPS5618632Y2 (US20110009641A1-20110113-C00160.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7632276U JPS5618632Y2 (US20110009641A1-20110113-C00160.png) 1976-06-14 1976-06-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7632276U JPS5618632Y2 (US20110009641A1-20110113-C00160.png) 1976-06-14 1976-06-14

Publications (2)

Publication Number Publication Date
JPS52167453U true JPS52167453U (US20110009641A1-20110113-C00160.png) 1977-12-19
JPS5618632Y2 JPS5618632Y2 (US20110009641A1-20110113-C00160.png) 1981-05-01

Family

ID=28551220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7632276U Expired JPS5618632Y2 (US20110009641A1-20110113-C00160.png) 1976-06-14 1976-06-14

Country Status (1)

Country Link
JP (1) JPS5618632Y2 (US20110009641A1-20110113-C00160.png)

Also Published As

Publication number Publication date
JPS5618632Y2 (US20110009641A1-20110113-C00160.png) 1981-05-01

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