JPS52155471U - - Google Patents
Info
- Publication number
- JPS52155471U JPS52155471U JP6446276U JP6446276U JPS52155471U JP S52155471 U JPS52155471 U JP S52155471U JP 6446276 U JP6446276 U JP 6446276U JP 6446276 U JP6446276 U JP 6446276U JP S52155471 U JPS52155471 U JP S52155471U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6446276U JPS5751469Y2 (fr) | 1976-05-20 | 1976-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6446276U JPS5751469Y2 (fr) | 1976-05-20 | 1976-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52155471U true JPS52155471U (fr) | 1977-11-25 |
| JPS5751469Y2 JPS5751469Y2 (fr) | 1982-11-10 |
Family
ID=28528617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6446276U Expired JPS5751469Y2 (fr) | 1976-05-20 | 1976-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5751469Y2 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5871546A (ja) * | 1981-10-23 | 1983-04-28 | Fujitsu Ltd | イオン注入装置 |
-
1976
- 1976-05-20 JP JP6446276U patent/JPS5751469Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5871546A (ja) * | 1981-10-23 | 1983-04-28 | Fujitsu Ltd | イオン注入装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5751469Y2 (fr) | 1982-11-10 |