JPS52142976A - Production of semiconductor integrated circuit device - Google Patents
Production of semiconductor integrated circuit deviceInfo
- Publication number
- JPS52142976A JPS52142976A JP6023976A JP6023976A JPS52142976A JP S52142976 A JPS52142976 A JP S52142976A JP 6023976 A JP6023976 A JP 6023976A JP 6023976 A JP6023976 A JP 6023976A JP S52142976 A JPS52142976 A JP S52142976A
- Authority
- JP
- Japan
- Prior art keywords
- production
- integrated circuit
- semiconductor integrated
- circuit device
- improvement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6023976A JPS52142976A (en) | 1976-05-24 | 1976-05-24 | Production of semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6023976A JPS52142976A (en) | 1976-05-24 | 1976-05-24 | Production of semiconductor integrated circuit device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52142976A true JPS52142976A (en) | 1977-11-29 |
JPS5528221B2 JPS5528221B2 (fr) | 1980-07-26 |
Family
ID=13136416
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6023976A Granted JPS52142976A (en) | 1976-05-24 | 1976-05-24 | Production of semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52142976A (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03171348A (ja) * | 1989-11-30 | 1991-07-24 | Mita Ind Co Ltd | メモリチェック装置 |
-
1976
- 1976-05-24 JP JP6023976A patent/JPS52142976A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5528221B2 (fr) | 1980-07-26 |
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