JPS5213756B2 - - Google Patents
Info
- Publication number
- JPS5213756B2 JPS5213756B2 JP47026570A JP2657072A JPS5213756B2 JP S5213756 B2 JPS5213756 B2 JP S5213756B2 JP 47026570 A JP47026570 A JP 47026570A JP 2657072 A JP2657072 A JP 2657072A JP S5213756 B2 JPS5213756 B2 JP S5213756B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47026570A JPS5213756B2 (https=) | 1972-03-17 | 1972-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47026570A JPS5213756B2 (https=) | 1972-03-17 | 1972-03-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4895294A JPS4895294A (https=) | 1973-12-06 |
| JPS5213756B2 true JPS5213756B2 (https=) | 1977-04-16 |
Family
ID=12197194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47026570A Expired JPS5213756B2 (https=) | 1972-03-17 | 1972-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5213756B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH076609Y2 (ja) * | 1987-01-06 | 1995-02-15 | セイコー電子工業株式会社 | 集束イオンビーム加工装置 |
-
1972
- 1972-03-17 JP JP47026570A patent/JPS5213756B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4895294A (https=) | 1973-12-06 |