JPS52135447U - - Google Patents

Info

Publication number
JPS52135447U
JPS52135447U JP4419976U JP4419976U JPS52135447U JP S52135447 U JPS52135447 U JP S52135447U JP 4419976 U JP4419976 U JP 4419976U JP 4419976 U JP4419976 U JP 4419976U JP S52135447 U JPS52135447 U JP S52135447U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4419976U
Other languages
Japanese (ja)
Other versions
JPS5614365Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976044199U priority Critical patent/JPS5614365Y2/ja
Publication of JPS52135447U publication Critical patent/JPS52135447U/ja
Application granted granted Critical
Publication of JPS5614365Y2 publication Critical patent/JPS5614365Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1976044199U 1976-04-09 1976-04-09 Expired JPS5614365Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976044199U JPS5614365Y2 (en:Method) 1976-04-09 1976-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976044199U JPS5614365Y2 (en:Method) 1976-04-09 1976-04-09

Publications (2)

Publication Number Publication Date
JPS52135447U true JPS52135447U (en:Method) 1977-10-14
JPS5614365Y2 JPS5614365Y2 (en:Method) 1981-04-03

Family

ID=28503263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976044199U Expired JPS5614365Y2 (en:Method) 1976-04-09 1976-04-09

Country Status (1)

Country Link
JP (1) JPS5614365Y2 (en:Method)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843941A (en:Method) * 1971-10-07 1973-06-25
JPS4946584A (en:Method) * 1972-09-13 1974-05-04
JPS4991080A (en:Method) * 1972-12-29 1974-08-30

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843941A (en:Method) * 1971-10-07 1973-06-25
JPS4946584A (en:Method) * 1972-09-13 1974-05-04
JPS4991080A (en:Method) * 1972-12-29 1974-08-30

Also Published As

Publication number Publication date
JPS5614365Y2 (en:Method) 1981-04-03

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