JPS5213512B2 - - Google Patents

Info

Publication number
JPS5213512B2
JPS5213512B2 JP10396372A JP10396372A JPS5213512B2 JP S5213512 B2 JPS5213512 B2 JP S5213512B2 JP 10396372 A JP10396372 A JP 10396372A JP 10396372 A JP10396372 A JP 10396372A JP S5213512 B2 JPS5213512 B2 JP S5213512B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10396372A
Other languages
Japanese (ja)
Other versions
JPS4962383A (US20020051482A1-20020502-M00012.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10396372A priority Critical patent/JPS5213512B2/ja
Publication of JPS4962383A publication Critical patent/JPS4962383A/ja
Publication of JPS5213512B2 publication Critical patent/JPS5213512B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10396372A 1972-10-19 1972-10-19 Expired JPS5213512B2 (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10396372A JPS5213512B2 (US20020051482A1-20020502-M00012.png) 1972-10-19 1972-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10396372A JPS5213512B2 (US20020051482A1-20020502-M00012.png) 1972-10-19 1972-10-19

Publications (2)

Publication Number Publication Date
JPS4962383A JPS4962383A (US20020051482A1-20020502-M00012.png) 1974-06-17
JPS5213512B2 true JPS5213512B2 (US20020051482A1-20020502-M00012.png) 1977-04-14

Family

ID=14368017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10396372A Expired JPS5213512B2 (US20020051482A1-20020502-M00012.png) 1972-10-19 1972-10-19

Country Status (1)

Country Link
JP (1) JPS5213512B2 (US20020051482A1-20020502-M00012.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0538310Y2 (US20020051482A1-20020502-M00012.png) * 1986-07-21 1993-09-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0538310Y2 (US20020051482A1-20020502-M00012.png) * 1986-07-21 1993-09-28

Also Published As

Publication number Publication date
JPS4962383A (US20020051482A1-20020502-M00012.png) 1974-06-17

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