JPS5213195B2 - - Google Patents

Info

Publication number
JPS5213195B2
JPS5213195B2 JP5584472A JP5584472A JPS5213195B2 JP S5213195 B2 JPS5213195 B2 JP S5213195B2 JP 5584472 A JP5584472 A JP 5584472A JP 5584472 A JP5584472 A JP 5584472A JP S5213195 B2 JPS5213195 B2 JP S5213195B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5584472A
Other languages
Japanese (ja)
Other versions
JPS4917674A (US20030199744A1-20031023-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5584472A priority Critical patent/JPS5213195B2/ja
Publication of JPS4917674A publication Critical patent/JPS4917674A/ja
Publication of JPS5213195B2 publication Critical patent/JPS5213195B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP5584472A 1972-06-05 1972-06-05 Expired JPS5213195B2 (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5584472A JPS5213195B2 (US20030199744A1-20031023-C00003.png) 1972-06-05 1972-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5584472A JPS5213195B2 (US20030199744A1-20031023-C00003.png) 1972-06-05 1972-06-05

Publications (2)

Publication Number Publication Date
JPS4917674A JPS4917674A (US20030199744A1-20031023-C00003.png) 1974-02-16
JPS5213195B2 true JPS5213195B2 (US20030199744A1-20031023-C00003.png) 1977-04-12

Family

ID=13010310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5584472A Expired JPS5213195B2 (US20030199744A1-20031023-C00003.png) 1972-06-05 1972-06-05

Country Status (1)

Country Link
JP (1) JPS5213195B2 (US20030199744A1-20031023-C00003.png)

Also Published As

Publication number Publication date
JPS4917674A (US20030199744A1-20031023-C00003.png) 1974-02-16

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